Title:
UBM ELECTRODE STRUCTURE FOR RADIATION DETECTOR, RADIATION DETECTOR, AND METHOD FOR MANUFACTURING SAID DETECTOR AND STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2016/157589
Kind Code:
A1
Abstract:
Provided are a UBM electrode structure for a radiation detector having high electrode adhesion strength and minimal peeling, and a radiation detector provided with the UBM electrode structure for a radiation detector. Also provided are: a method for manufacturing a UBM electrode structure for a radiation detector in which peeling does not occur during UBM structure formation, during a solder bonding step, or during bonding of a signal wire to a Pt layer; and a method for manufacturing a radiation detector in which the method for manufacturing a UBM electrode structure for a radiation detector is used. This UBM electrode structure for a radiation detector is provided with a CdTe substrate or a CdZnTe substrate, and a Pt electrode layer disposed on the CdTe substrate or the CdZnTe substrate. The strength of adhesion of the Pt electrode layer on the CdTe substrate or on the CdZnTe substrate is at least 0.5 N/cm.
More Like This:
Inventors:
MIKAMI MAKOTO (JP)
MURAKAMI KOUJI (JP)
NODA AKIRA (JP)
MURAKAMI KOUJI (JP)
NODA AKIRA (JP)
Application Number:
PCT/JP2015/080595
Publication Date:
October 06, 2016
Filing Date:
October 29, 2015
Export Citation:
Assignee:
JX NIPPON MINING & METALS CORP (JP)
International Classes:
H01L31/00; G01T1/24; H01L27/144; H01L27/146; H01L31/08; H01L31/10
Foreign References:
| JP2003142673A | 2003-05-16 | |||
| JP2013157494A | 2013-08-15 | |||
| JPH0336744A | 1991-02-18 | |||
| JP2010098329A | 2010-04-30 |
Other References:
See also references of EP 3279946A4
Attorney, Agent or Firm:
Takahashi, Hayashi and Partner Patent Attorneys, Inc. (JP)
Patent business corporation Takahashi and wood and partners (JP)
Patent business corporation Takahashi and wood and partners (JP)
Download PDF: