Title:
ULTRASONIC TRANSDUCER AND ULTRASONIC DIAGNOSTIC APPARATUS PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2010/137528
Kind Code:
A1
Abstract:
Disclosed is a preferable protrusion placement structure which minimizes the insertion of charge to a insulating film caused by contact of the lower surface of a membrane to the lower surface of a cavity section, and minimizes the increase in the driving voltage for a CMUT and the decrease in reception sensitivity caused by providing the insulating film with protrusions which stick out into the cavity section. Also disclosed is an ultrasonic diagnostic apparatus provided with the same. An ultrasonic transducer is provided with a first electrode, a lower insulating film formed on the first electrode, an upper insulating film provided on the lower insulating film in a way that forms a cavity section, and a second electrode formed on the upper insulating film. Protrusions are formed at the lower insulating film or upper insulating film at the cavity section side, and openings are formed at the first electrode or second electrode corresponding to the positions where the protrusions were formed.
Inventors:
MACHIDA SHUNTARO (JP)
KOBAYASHI TAKASHI (JP)
KOBAYASHI TAKASHI (JP)
Application Number:
PCT/JP2010/058636
Publication Date:
December 02, 2010
Filing Date:
May 21, 2010
Export Citation:
Assignee:
HITACHI MEDICAL CORP (JP)
MACHIDA SHUNTARO (JP)
KOBAYASHI TAKASHI (JP)
MACHIDA SHUNTARO (JP)
KOBAYASHI TAKASHI (JP)
International Classes:
H04R19/00; A61B8/00; H04R1/40
Foreign References:
| JP2007074263A | 2007-03-22 | |||
| JP2006020313A | 2006-01-19 | |||
| JP2008098697A | 2008-04-24 | |||
| JP2009055474A | 2009-03-12 | |||
| JP2006211185A | 2006-08-10 | |||
| JP2008099036A | 2008-04-24 | |||
| JP2009100460A | 2009-05-07 |
Attorney, Agent or Firm:
Sannozaka Patent Law Firm (JP)
Patent business corporation The Sanno hill patent firm (JP)
Patent business corporation The Sanno hill patent firm (JP)
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