Title:
ULTRASONIC TRANSDUCER, METHOD OF PRODUCING SAME, AND ULTRASOUND PROBE USING SAME
Document Type and Number:
WIPO Patent Application WO/2010/100861
Kind Code:
A1
Abstract:
Disclosed is an art for a capacitive micromachined ultrasonic transducer (CMUT), which suppresses deformation in a cavity, non-uniformity in the thickness of an insulating film enclosing the cavity, and deterioration in the flatness of the surface profile of a membrane, even when the bottom electrode of the ultrasonic transducer is electrically connected from the bottom of the bottom electrode. The ultrasonic transducer is provided with: a bottom electrode (306); an electric connection part (304) which is connected to the bottom electrode from the bottom of the bottom electrode; a first insulating film which is formed so as to cover the bottom electrode; a cavity (308) which is formed on the first insulating film so as to overlap the bottom electrode when seen from above; a second insulating film which is formed so as to cover the cavity (308); and a top electrode (310) which is formed on the second insulating film so as to overlap the cavity (308) when seen from above. The electric connection part (304) to the bottom electrode (306) is positioned so as to not overlap the cavity (308) when seen from above.
Inventors:
MACHIDA SHUNTARO (JP)
KOBAYASHI TAKASHI (JP)
KOBAYASHI TAKASHI (JP)
Application Number:
PCT/JP2010/001200
Publication Date:
September 10, 2010
Filing Date:
February 23, 2010
Export Citation:
Assignee:
HITACHI MEDICAL CORP (JP)
MACHIDA SHUNTARO (JP)
KOBAYASHI TAKASHI (JP)
MACHIDA SHUNTARO (JP)
KOBAYASHI TAKASHI (JP)
International Classes:
H04R19/00; H01L29/84; H04R31/00
Foreign References:
| JP2006211185A | 2006-08-10 | |||
| JP2007097760A | 2007-04-19 | |||
| JP2007229327A | 2007-09-13 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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