VACUUM DEPOSITION DEVICE FOR HIGH-SPEED COATING

Title:

VACUUM DEPOSITION DEVICE FOR HIGH-SPEED COATING

Document Type and Number:

WIPO Patent Application WO/2017/111384

Kind Code:

A1

Abstract:

The present invention relates to a vacuum deposition device for high-speed coating, comprising: a vacuum chamber having a reception space arranged therein; an evaporation crucible disposed in the reception space to evaporate a coating material; and a cyclone filter disposed in the reception space, wherein the cyclone filter separates a coarse particle and steam generated during the evaporation of the coating material. Therefore, the vacuum deposition device for high-speed coating can remove a coarse particle generated in the high-speed coating, prevent the rotation of steam, using a baffle inserted between a steam ejection opening and an exit of the cyclone filter, and thus obtain a coating layer having the excellent uniformity of coating.

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Inventors:

NAM KYUNG HOON (KR)
KIM SANG JOON (KR)
KO KYOUNG PIL (KR)
KIM TAE YEOB (KR)
EOM MUN JONG (KR)

Application Number:

PCT/KR2016/014637

Publication Date:

June 29, 2017

Filing Date:

December 14, 2016

Export Citation:

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Assignee:

POSCO (KR)

International Classes:

C23C14/24; C23C14/02; C23C14/54

Foreign References:

KR20030030757A	2003-04-18
KR100477546B1	2005-03-18
KR101507055B1	2015-04-01
KR20050030963A	2005-03-31
KR20010088079A	2001-09-26
KR100598717B1	2006-07-11

Other References: