Title:
VACUUM DEVICE AND METHOD FOR PRODUCING VACUUM PROCESSED BODY
Document Type and Number:
WIPO Patent Application WO/2022/180914
Kind Code:
A1
Abstract:
[Problem] To provide: a vacuum device which is reduced in the amount of a residual gas under vacuum, while being satisfactory in terms of cost, strength and the like; and a method for producing a vacuum processed body. [Solution] A vacuum device 201 which comprises: a vacuum holding container 21, which maintains a predetermined vacuum in the internal space thereof, while having a holding unit 8 that holds an object 4 to be processed under vacuum inside; and other members 10, 102, 104, 106, 120, 130, 132 which are or are not in communication with the vacuum holding container, while being connected thereto. This vacuum device 201 is characterized in that the vacuum holding container is formed of a Be-Cu alloy.
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Inventors:
NAKAMURA TAKAO (JP)
Application Number:
PCT/JP2021/036960
Publication Date:
September 01, 2022
Filing Date:
October 06, 2021
Export Citation:
Assignee:
UNIV TOKYO (JP)
International Classes:
C23C14/34; B01J3/00; B01J3/02; C23C14/24
Foreign References:
| JP2006009038A | 2006-01-12 | |||
| JPH072277A | 1995-01-06 | |||
| JP2018141657A | 2018-09-13 | |||
| JPH06192829A | 1994-07-12 | |||
| JP2016108577A | 2016-06-20 |
Attorney, Agent or Firm:
AKAO Kenichiro et al. (JP)
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