Title:
VACUUM EVAPORATION APPARATUS AND EVAPORATION SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/019538
Kind Code:
A1
Abstract:
A vacuum evaporation apparatus and an evaporation source device, wherein the evaporation source device is applied to a coating apparatus comprising an evaporation chamber (100), and the evaporation source device comprises: an accommodating cavity (1) having a first open end (11), wherein the accommodating cavity (1) faces the evaporation chamber (100), and the first open end (11) is connected to an outer wall of the evaporation chamber (100); a crucible (2) that is at least partially disposed in the accommodating cavity (1); and a nozzle (3) that is connected to the crucible (2) and located outside of the accommodating cavity (1).
Inventors:
HUANG CHUNQUAN (CN)
ZHOU WENYAN (CN)
ZOU YIHUI (CN)
BAO LIQIANG (CN)
DING DUZE (CN)
ZHOU WENYAN (CN)
ZOU YIHUI (CN)
BAO LIQIANG (CN)
DING DUZE (CN)
Application Number:
PCT/CN2018/110732
Publication Date:
January 30, 2020
Filing Date:
October 18, 2018
Export Citation:
Assignee:
HUAXIA NEW ENERGY GUANGDONG TECH CO LTD (CN)
International Classes:
C23C14/24
Foreign References:
| CN108660420A | 2018-10-16 | |||
| CN103361607A | 2013-10-23 | |||
| JP2012207263A | 2012-10-25 | |||
| CN107849686A | 2018-03-27 | |||
| CN205635762U | 2016-10-12 | |||
| CN1103112A | 1995-05-31 | |||
| CN107815648A | 2018-03-20 |
Attorney, Agent or Firm:
BEIJING INTELLEGAL INTELLECTUAL PROPERTY AGENT LTD. (CN)
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