Title:
VACUUM PUMP, SPACER, AND CASING
Document Type and Number:
WIPO Patent Application WO/2022/255202
Kind Code:
A1
Abstract:
[Problem] Proposed are a vacuum pump, a spacer, and a casing which can suppress an influence of heat from a to-be-exhausted device on a rotary wing while suppressing man hours and costs required for attachment to the to-be-exhausted device. [Solution] A vacuum pump 100 according to the present invention is characterized by having a rotary wing 102 and a fixed wing 123 which are axially arranged alternately in multiple stages in a casing 127 having an air intake port 101, and comprising a heat transfer suppression means which suppresses the transfer of heat, on the intake port 101 side, from the casing 127 to the fixed wing 123.
Inventors:
SUZUKI HARUKI (JP)
Application Number:
PCT/JP2022/021456
Publication Date:
December 08, 2022
Filing Date:
May 25, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2002180988A | 2002-06-26 |
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