Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2023/100813
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump having high shaft support capability. [Solution] In the present invention, an axial-direction magnetic bearing 110 has a magnetic path separation structure. The axial-direction magnetic bearing 110 has: yokes 212A, 212B; coil parts 213A, 213B that generate magnetism in the yokes 212A, 212B; and a rotation-side non-magnetic body 201 that interrupts a magnetic path. In the magnetic path separation structure, axial attraction force-use magnetic path passage gaps 230A, 232A, 230B, 232B and the rotation-side non-magnetic body 201 separate axial attractive force-use magnetic paths 218A, 218B and a radial passive restoring force magnetic path 226.
Inventors:
KAWASHIMA TOSHIAKI (JP)
Application Number:
PCT/JP2022/043787
Publication Date:
June 08, 2023
Filing Date:
November 28, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04; F16C32/04
Domestic Patent References:
| WO2009093428A1 | 2009-07-30 |
Foreign References:
| JP2018179262A | 2018-11-15 | |||
| CN204371939U | 2015-06-03 |
Download PDF: