Title:
VALVE DEVICE, FLUID CONTROL DEVICE USING SAID VALVE DEVICE, AND SEMICONDUCTOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/107139
Kind Code:
A1
Abstract:
[Problem] To provide a valve device for which size and cost can be reduced, and which has a bleed function. [Solution] A valve body (20) is divided into: an accommodation recessed section (22) that opens on the surface of the valve body (20) and in which a valve element (2) is contained; and a primary-side flow channel (21) and a secondary-side flow channel (24) that are connected to the accommodation recessed section (22), the valve element (2) having a seal part that blocks direct communication between the primary-side flow channel (21) and the secondary-side flow channel (24) via the accommodation recessed section (22), a diversion flow channel (50a) that communicates between the primary-side flow channel (21) and the secondary-side flow channel (24) via the valve element (2), and a bleed hole (50p) that communicates with the diversion flow channel (50a) and with the secondary-side flow channel (24) via the accommodation recessed section (22).
More Like This:
| WO/2005/066528 | VALVE DEVICE |
Inventors:
WATANABE KAZUNARI (JP)
SHIGYOU KOHEI (JP)
AIKAWA KENJI (JP)
NAKATA TOMOHIRO (JP)
MATSUDA TAKAHIRO (JP)
SHINOHARA TSUTOMU (JP)
SHIGYOU KOHEI (JP)
AIKAWA KENJI (JP)
NAKATA TOMOHIRO (JP)
MATSUDA TAKAHIRO (JP)
SHINOHARA TSUTOMU (JP)
Application Number:
PCT/JP2018/041944
Publication Date:
June 06, 2019
Filing Date:
November 13, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K7/16; F16K1/42; F16K27/00
Foreign References:
| JPH0814415A | 1996-01-16 | |||
| JPH0550254U | 1993-07-02 | |||
| JP2007078006A | 2007-03-29 |
Attorney, Agent or Firm:
FUJIMOTO Kenji (JP)
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