Title:
VAPORIZED FEED DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/054135
Kind Code:
A1
Abstract:
A vaporized feed device 1 is provided with: a pre-heating unit 2 for pre-heating a liquid raw material L; a vaporization unit 3 which is disposed over the pre-heating unit 2 to heat and vaporize the pre-heated liquid raw material L delivered from the pre-heating unit 2; a flow rate control device 4 which is disposed over the vaporization unit 3 to control the flow rate of a gas G delivered from the vaporization unit 3; and a heater 5 for heating the pre-heating unit 2, the vaporization unit 3, and the flow rate control device 4.
Inventors:
NAKATANI TAKATOSHI (JP)
HIDAKA ATSUSHI (JP)
TOKUDA ICHIRO (JP)
NAKATSUJI KEISUKE (JP)
HIDAKA ATSUSHI (JP)
TOKUDA ICHIRO (JP)
NAKATSUJI KEISUKE (JP)
Application Number:
PCT/JP2020/033395
Publication Date:
March 25, 2021
Filing Date:
September 03, 2020
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
H01L21/31; C23C16/448
Domestic Patent References:
| WO2002001949A2 | 2002-01-10 | |||
| WO2016174832A1 | 2016-11-03 |
Foreign References:
| JP2016122841A | 2016-07-07 | |||
| JP2012142380A | 2012-07-26 | |||
| JP2003031562A | 2003-01-31 | |||
| JP2006124837A | 2006-05-18 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
Download PDF: