Title:
VERTICAL CAVITY SURFACE EMITTING LASER
Document Type and Number:
WIPO Patent Application WO/2023/238428
Kind Code:
A1
Abstract:
In the present invention, at least one mesa structure internally including a light emission portion is arranged on a first surface of a semiconductor layer. A heat transfer member formed of a heat transfer material is bonded to a second surface of the semiconductor layer on the opposite side from the first surface. The heat transfer member includes: a high heat conduction portion which has heat conductivity higher than the heat conductivity of the semiconductor layer and has a linear expansion coefficient larger than a linear expansion coefficient of the semiconductor layer; and a constraint portion which has a linear expansion coefficient smaller than the linear expansion coefficient of the high heat conduction portion. The high heat conduction portion includes at least one through portion formed of a heat transfer material and the through portion extends from an upper surface of the heat transfer member, which is a surface bonded to the second surface of the semiconductor layer, toward a direction orthogonal to the upper surface and reaches the lower surface of the heat transfer member on the opposite side from the upper surface. In a plan view of the second surface, an extended circle having a radius longer than that of the smallest enclosing circle of the mesa structure by a distance from a lower end of the mesa structure to the constraint portion in the thickness direction of the semiconductor layer and the through portion overlap with each other.
Inventors:
YAMADA SHUHEI (JP)
HIMEDA KOSHI (JP)
USHIMI YOSHIMITSU (JP)
KABURAKI SHINJI (JP)
HIMEDA KOSHI (JP)
USHIMI YOSHIMITSU (JP)
KABURAKI SHINJI (JP)
Application Number:
PCT/JP2023/000314
Publication Date:
December 14, 2023
Filing Date:
January 10, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01S5/183; H01S5/024
Foreign References:
| JP2005086054A | 2005-03-31 | |||
| US20170025815A1 | 2017-01-26 | |||
| JP2015028995A | 2015-02-12 | |||
| JP2010192672A | 2010-09-02 | |||
| JP2000261088A | 2000-09-22 | |||
| JP2008078612A | 2008-04-03 | |||
| JP2012028068A | 2012-02-09 |
Attorney, Agent or Firm:
KITAYAMA Mikio et al. (JP)
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