VIBRATING BODY AND SUBSTRATE PROCESSING APPARATUS

Title:

VIBRATING BODY AND SUBSTRATE PROCESSING APPARATUS

Document Type and Number:

WIPO Patent Application WO/2024/071209

Kind Code:

A1

Abstract:

A vibrating body according to an embodiment is used for cleaning a substrate. A contact portion of the vibrating body with a liquid on a surface of the substrate has a region which is inclined with respect to an end of the vibrating body that faces the substrate. If the angle between the inclined region and an extension line of the end of the vibrating body is θ, the expression included herein is satisfied.　20°≤θ≤87°

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Inventors:

KAMIYA MASAYA (JP)
DEMURA KENSUKE (JP)
NAKAMURA SATOSHI (JP)
NAKAMURA MINAMI (JP)

Application Number:

PCT/JP2023/035170

Publication Date:

April 04, 2024

Filing Date:

September 27, 2023

Export Citation:

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Assignee:

SHIBAURA MECHATRONICS CORP (JP)

International Classes:

H01L21/304; B06B1/02; B08B3/12

Attorney, Agent or Firm:

IX PATENT LAW FIRM, P.C. (JP)

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