Title:
VIBRATION-POWERED GENERATION ELEMENT AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2022/130760
Kind Code:
A1
Abstract:
The present invention prevents exertion of strong force on an elastic support part of a MEMS vibration-powered generation element. A vibration-powered generation element comprises: a fixed electrode fixed to a base part; a movable electrode movable relative to the fixed electrode; an elastic support part which has one end connected to the base part, and another end connected to the movable electrode, and elastically supports the movable electrode; and at least one of a first member which is fixed to the movable member and faces the base part, or a member fixed the base part, so as to be spaced apart in a direction orthogonal to a vibration plane in which the movable electrode vibrates, and a second member which is fixed to the base part and faces the movable electrode, or a member fixed to the movable electrode, so as to be spaced apart in the direction orthogonal to the vibration plane.
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Inventors:
SHIMOMURA NORIKO (JP)
ASHIZAWA HISAYUKI (JP)
ASHIZAWA HISAYUKI (JP)
Application Number:
PCT/JP2021/037969
Publication Date:
June 23, 2022
Filing Date:
October 13, 2021
Export Citation:
Assignee:
SAGINOMIYA SEISAKUSHO INC (JP)
International Classes:
B81B3/00; B81C1/00; H02N1/00
Domestic Patent References:
| WO2011077717A1 | 2011-06-30 |
Foreign References:
| JP2020065326A | 2020-04-23 | |||
| JP2020114150A | 2020-07-27 | |||
| JP2014050196A | 2014-03-17 |
Other References:
See also references of EP 4242169A1
Attorney, Agent or Firm:
TANI & ABE, P.C. (JP)
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