Title:
WAFER TRANSMISSION APPARATUS, AND DEVICE PLATFORM SYSTEM AND WAFER TRANSMISSION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2024/031945
Kind Code:
A1
Abstract:
Disclosed in the present invention are a wafer transmission apparatus, and a device platform system and a wafer transmission method therefor. The wafer transmission apparatus comprises a conveying manipulator, a placement rack, an alignment apparatus, and an alignment manipulator. The conveying manipulator is located among wafer loading boxes, the placement rack, and a wafer processing device. The conveying manipulator is used for carrying wafers in the wafer loading boxes onto the placement rack, and carrying the aligned wafers on the placement rack into the wafer processing device. The alignment manipulator is located between the placement rack and the alignment apparatus, and is used for carrying the wafers between the placement rack and the alignment apparatus. The placement rack caches the wafers and the manipulators do not need to wait, so that the wafer transmission speed is increased, and the wafer production capacity is further improved.
Inventors:
YANG MICHAEL X (CN)
YE YING (CN)
YE YING (CN)
Application Number:
PCT/CN2023/075582
Publication Date:
February 15, 2024
Filing Date:
February 13, 2023
Export Citation:
Assignee:
WUHAN BRANCH OF SHANGHAI GONA SEMICONDUCTOR TECH CO LTD (CN)
YANG MICHAEL X (CN)
SHANGHAI GONA SEMICONDUCTOR TECH CO LTD (CN)
YANG MICHAEL X (CN)
SHANGHAI GONA SEMICONDUCTOR TECH CO LTD (CN)
International Classes:
H01L21/68; H01L21/677
Domestic Patent References:
| WO2021085680A1 | 2021-05-06 |
Foreign References:
| CN115020308A | 2022-09-06 | |||
| US20100172720A1 | 2010-07-08 | |||
| JP2000012647A | 2000-01-14 | |||
| CN111916346A | 2020-11-10 | |||
| CN112670202A | 2021-04-16 |
Attorney, Agent or Firm:
SUZHOU HUICHENG HUIZHI PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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