X-RAY ANALYSIS DEVICE AND X-RAY GENERATION UNIT

Title:

X-RAY ANALYSIS DEVICE AND X-RAY GENERATION UNIT

Document Type and Number:

WIPO Patent Application WO/2020/084890

Kind Code:

A1

Abstract:

Provided are an X-ray analysis device and X-ray generation unit that make it possible to reduce scanning time. The X-ray analysis device comprises the X-ray generation unit. The X-ray generation unit comprises a target plate having a target that is irradiated with an electron beam from an electron beam source and generates X-rays, an X-ray concentration element that moves together with the target plate and concentrates the X-rays generated by the target, and a drive unit for changing the position of the target plate or X-ray concentration element in relation to the electron beam source.

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Inventors:

AOYAMA TOMOKI (JP)

Application Number:

PCT/JP2019/033399

Publication Date:

April 30, 2020

Filing Date:

August 27, 2019

Export Citation:

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Assignee:

HORIBA LTD (JP)

International Classes:

G01N23/223; G21K1/02; G21K1/06; G21K5/02; G21K5/08; H05G1/00

Foreign References:

JPH08247971A	1996-09-27
JP2010266368A	2010-11-25
JP2002071586A	2002-03-08
JP2002328102A	2002-11-15
JPH05273400A	1993-10-22
JP2011520233A	2011-07-14
JP2005512288A	2005-04-28
JP2008268105A	2008-11-06
US4519092A	1985-05-21

Attorney, Agent or Firm:

KOHNO, Hideto et al. (JP)

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