Title:
X-RAY GENERATION DEVICE AND X-RAY GENERATION METHOD
Document Type and Number:
WIPO Patent Application WO/2013/168468
Kind Code:
A1
Abstract:
This X-ray generation device (1) is provided with: an electron gun section (3) that emits an electron beam (EB);, and a target section (T). Said target section (T) that comprises: a substrate (21) comprising diamond; and a target body (23) that comprises a material generating an X-ray (XR) from input of the electron beam (EB), and that is buried in close contact with the substrate (21). The outer diameter of the target body (23) is in the range 0.05-1 μm. The outer diameter of the irradiation field of the electron beam (EB) in the target section (T) is in the range 1.1-2.5 times the outer diameter of the target body (23). The X-ray generation device (1) irradiates the electron beam (EB) onto the target body (23) such that the target body (23) is contained in the irradiation field, thereby generating the X-ray (XR) from the target body (23). By means of this structure, an X-ray component generated by inputting the electron beam to a portion in the target section other than the target body is reduced to a level not affecting spatial resolution, thereby enabling the provided X-ray generation device to reducereducing a drop in spatial resolution.
Inventors:
ISHII ATSUSHI (JP)
SUYAMA MOTOHIRO (JP)
SUZUKI NAONOBU (JP)
YABUSHITA RYOSUKE (JP)
SUYAMA MOTOHIRO (JP)
SUZUKI NAONOBU (JP)
YABUSHITA RYOSUKE (JP)
Application Number:
PCT/JP2013/057415
Publication Date:
November 14, 2013
Filing Date:
March 15, 2013
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01J35/08; H01J35/14; H01J35/30; H05G1/52
Domestic Patent References:
| WO2008078477A1 | 2008-07-03 |
Foreign References:
| JP2011077027A | 2011-04-14 | |||
| JPS6124134A | 1986-02-01 | |||
| JP2011071101A | 2011-04-07 | |||
| JPH1187089A | 1999-03-30 | |||
| JPH03274500A | 1991-12-05 | |||
| JPH0756000A | 1995-03-03 | |||
| JP2007134325A | 2007-05-31 | |||
| JP2004028845A | 2004-01-29 | |||
| US5148462A | 1992-09-15 |
Other References:
See also references of EP 2849202A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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