Title:
X-RAY INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/207831
Kind Code:
A1
Abstract:
An X-ray inspection device (10) comprises: an X-ray generation device (20) for emitting X-rays; a sample placement portion (30) provided in a direction in which the X-rays are emitted with respect to the X-ray generation device; and a curved X-ray detector (40) provided on a side opposite to the X-ray generation device with respect to the sample placement portion so as to be rotatably movable about a rotation axis. The X-ray generation device may emit the X-rays radially about the rotation axis. The sample placement portion has a principal surface on which a sample (31) is placed, and the X-ray detector may be curved so as to approach the principal surface as the X-ray detector moves away from the X-ray generation device in a direction parallel to the principal surface.
Inventors:
ADACHI MASAYA (JP)
Application Number:
PCT/JP2018/044527
Publication Date:
October 31, 2019
Filing Date:
December 04, 2018
Export Citation:
Assignee:
JAPAN DISPLAY INC (JP)
International Classes:
G01N23/046
Foreign References:
| JP2017156328A | 2017-09-07 | |||
| JP2003070776A | 2003-03-11 | |||
| JP2001095789A | 2001-04-10 | |||
| JP2017203752A | 2017-11-16 | |||
| JP2006078251A | 2006-03-23 | |||
| JP2017185219A | 2017-10-12 | |||
| JP2006084467A | 2006-03-30 | |||
| JP2011521754A | 2011-07-28 |
Attorney, Agent or Firm:
TAKAHASHI, HAYASHI AND PARTNER PATENT ATTORNEYS, INC. (JP)
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