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WO/2008/041294A1 |
An electrostatic chuck is replaceably installed on the substrate-side surface of a holding plate without any modification on the surface. Electrostatic chucks (2) formed in a thin plate-like shape or a membrane-like shape are respectivel...
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WO/2008/041293A1 |
An electrostatic chuck device enabling even a thin work with low rigidity to be releasedly placed without causing deformation and displacement during the movement. An electrostatic chuck (2) is attached to a holding plate (1) by an attac...
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WO/2008/038081A1 |
An apparatus (10) and process for forming packs and stacking pallets of large-format ceramic tiles includes use of plier groups for removing single tiles exiting from a control and selection station of the tiles, piling the tiles in dete...
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WO/2008/035199A2 |
The invention relates to an equipment for the surface treatment of parts, that comprises a plurality of treatment vats (4) arranged in series and comprising rotating drums (2) provided with means for temporarily attaching the parts to be...
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WO/2008/032591A1 |
A position of a control point is kept by correcting warping caused by inertia moment operated while an arm of a robot is extending and retracting. In a control device (104) for controlling operation of the robot composed of a plurality o...
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WO/2008/032455A1 |
A substrate transfer apparatus is provided with a main conveyer for individually transferring substrates; a branched conveyer horizontally branched from the main conveyer; and a substrate receiving and transferring section for receiving ...
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WO/2008/032456A1 |
A substrate transfer apparatus is provided with a main conveyer for individually transferring substrates; a branched conveyer horizontally branched from the main conveyer; a supporting section for supporting the substrates (P) on the mai...
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WO/2008/029943A1 |
Occurrence of unevenness or a pin trace is prevented on the surface of a substrate to be processed. A lift pin mechanism is equipped with an elevating/lowering pin for supporting the substrate to be processed by abutting against it from ...
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WO/2008/029680A1 |
[PROBLEMS] To provide a transfer roller having stable transfer performance and to provide a substrate transfer apparatus. [MEANS FOR SOLVING PROBLEMS] Provided is a substrate transfer apparatus to be used in an inline substrate processin...
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WO/2008/026278A1 |
A device for automatically working a workpiece has a pair of stationary frames each extending in the horizontal direction and fixed at both ends of the stationary frame (130), a pair of movable frames (140) each extending in the horizont...
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WO/2008/023560A1 |
A double arm robot having double arms vertically movable independent of each other, having a compact column achieved by controlling the distance between upper and lower support members to an appropriate range, having a reduced installati...
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WO/2008/019727A1 |
A unit (10) is described, in particular for cataphoretic immersion coating of objects. A transport device (14) having a movable moving mechanism (16) guides the objects through the unit (10) and in the process moves them into and out of ...
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WO/2008/020005A1 |
The invention relates to a method for cutting of raw gas slabs (21) into a number of glass cuttings (25), comprising the steps of determining the supply of uncut or partially cut raw glass slabs (21), the continuous detecting of incoming...
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WO/2008/018285A1 |
A substrate is transferred and received to and from a discretionary holding plate on a wafer holding boat and a pitch of the holding plates is reduced compared with conventional pitches. A substrate transferring apparatus (300) is provid...
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WO/2008/013035A1 |
Occurrence of stripe-shaped uneven coating is reduced or suppressed effectively on the coating film of processing liquid formed on a substrate under processing in levitated conveyance system. In a coating region, a plurality of ejection ...
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WO/2008/006770A1 |
The invention relates to a holding device (1), especially for fixing a glass substrate during a cutting process. Said holding device comprises a housing (2) and a plunger (3) which can be axially displaced in relation to the housing (2)....
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WO/2008/002584A1 |
Described herein are methods for protecting glass with the use of glassine paper.
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WO/2007/150039A2 |
A substrate support and transport system for substrates to be processed is provided The substrate support system includes a conveying mechanism (100) for supporting the substrate (112) in a vertical orientation The conveying mechanism (1...
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WO/2007/144982A1 |
Provided are a sticking and holding apparatus and a sticking and holding method by which a substrate can be surely stuck and held irrespective of the type of the substrate by a simple and low-cost structure. The apparatus is provided wit...
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WO/2007/140978A1 |
A method is described for producing a glass pane having at least one edge section which delimits the glass pane and for the production of which the glass pane has been severed along the edge section with the aid of a severing operation w...
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WO/2007/141570A1 |
Lifting frames (2) suitable for moving a pack of sheet material (244) are described. Lifting frames according to the invention comprise first and second legs (4, 5), each leg having a foot (8,10) mounted thereon. The pack to be moved sta...
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WO/2007/138279A1 |
The invention provides a method of manufacturing a plurality of spacers comprising: (a) providing a carrier medium; (b) applying one or more stripes of a first material on a first face of the carrier medium; and (c) applying a layer of a...
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WO/2007/139052A1 |
Provided is a substrate transfer apparatus which can perform stable and highly accurate transfer without making configuration complicated. A substrate transfer apparatus (30) is provided with a multijoint arm (31) whose one end is arrang...
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WO/2007/135468A1 |
A metallic basket for the chemical pre- treatment of profiles, frames, sheets, aluminium components or other alloys of various dimensions and geometrical shapes, which in comparison to the basket of the prior art is consisted additionall...
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WO/2007/123032A1 |
A vertical substrate conveyance device and film deposition equipment in which a film can be deposited on any surface regardless of the conveyance posture of a substrate, and a substrate can be conveyed while being supported without inter...
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WO/2007/119613A1 |
A conveyance apparatus capable of conveying a body while reliably holding it, and a conveyance method. The conveyance apparatus for conveying an object (W) while holding it has a conveyance body (30). The conveyance body (30) has holding...
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WO/2007/119530A1 |
Provided is a tray stack transfer apparatus which can easily and surely hold stacked trays by a simple constitution and has a high versatility. The tray stack transfer apparatus is provided with a pressing body (16), which abuts to and p...
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WO/2007/116419A1 |
Method for loading flat items into multilevel containers (21), characterized in that it comprises the following operating steps: - collecting a matrix of flat items in a collecting device (1); moving said matrix from the collecting devic...
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WO/2007/117545A2 |
The present invention relates to a substrate cassette support bar in a substrate cassette for housing a plurality of horizontally oriented substrates in multiple levels in the vertical direction, the substrate bar being arranged so as to...
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WO/2007/116080A1 |
A thin-glass gripper is described for holding and turning a flat workpiece (1), comprising a plurality of gripper arms (2a-h) having at least one suction lifter (3a-n) arranged in each case on them, wherein the gripper arms (2a-h) can be...
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WO/2007/117094A1 |
A package handler is disclosed, by which productivity and work efficiency can be enhanced in a manner of automatically performing a work of unloading a cut package from a cutting jig (5) and a work of loading a new uncut package on the c...
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WO/2007/117546A2 |
The present invention relates to a substrate cassette (12) that houses a plurality of horizontally oriented substrates (14) in multiple levels in the vertical direction and in which support bars (20) are arranged that support the substra...
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WO/2007/114293A1 |
Provided is a wafer storing cabinet, which has high transfer efficiency and storage efficiency, is not affected by dusts nor a gas generated from wafers being stored. A method for controlling such storage is also provided. In a storing c...
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WO/2007/108192A1 |
There is provided an electrostatic attraction apparatus and an attracting/releasing method capable of reliably attracting and quickly releasing a glass substrate. An attraction force for attracting a glass substrate is obtained according...
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WO/2007/105310A1 |
A transfer robot (A) comprises a hand (13) holding works (W), parts (12) on which the works (W) are placed, and a moving means (14) reciprocatingly moving the hand (13).
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WO/2007/099976A1 |
Provided is a substrate treating device capable of improving a tact time of a substrate treatment process. A polishing device as the substrate treating device includes a plurality of polishing units (3a, 3b) for polishing a semiconductor...
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WO/2007/091503A1 |
A robot device having an arm section and a control device. The arm section is constructed at least from a first arm and a second arm. The first arm has a work holding section for holding a workpiece and reciprocates. The second arm is co...
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WO/2007/088614A1 |
A device that floats by gas flow and a nozzle plate that is used for the device. The device can sufficiently floats a plate-like object in a stabilized attitude by gas flow with low pressure or with a small volume. The device that floats...
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WO/2007/088936A1 |
Provided are a gas flow transportation device that sufficiently floats a plate-like object by a low-pressure gas flow or a small amount of gas flow and stabilizes the posture of the object, and nozzle plate that is used for the gas flow ...
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WO/2007/080986A1 |
Provided is a substrate transfer robot, in which a contact type vacuum seal portion is cooled so that a vacuum seal may not exceed a heat resisting temperature thereby to prevent a drawback that the atmosphere leaks into a transfer chamb...
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WO/2007/080779A1 |
[PROBLEMS] An object having a temperature adjusted to an appropriate level is reliably conveyed with the temperature maintained. [MEANS FOR SOLVING PROBLEMS] An object conveyance apparatus having a slider arm (143) for conveying a wafer ...
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WO/2007/077765A1 |
Provided is a stage apparatus wherein a step is not generated between the upper end of a lift pin and placing plane of a stage in a status where a substrate to be processed is placed on the placing plane. A plasma processing apparatus wh...
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WO/2007/074855A1 |
Attention is paid on a micro energy loss which has not been considered in a conventional non-contact delivery device so as to effectively utilize energy of a fluid to realize improvement of energy efficiency and energy saving. The non-co...
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WO/2007/074854A1 |
Attention is paid on a micro energy loss which has not been considered in a conventional non-contact delivery device so as to effectively utilize energy of a fluid to realize improvement of energy efficiency and energy saving. The non-co...
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WO/2007/074798A1 |
A substrate conveyance method capable of continuously conveying substrates to a substrate processing device, the method being capable of processing the substrates while conveying them to a processing unit fixed to the substrate processin...
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WO/2007/071424A2 |
A device (1) for interconnection to a surface is disclosed comprising a base (2) having a lower surface from which a plurality of suction cups (11) are protruding, each of the suction cups comprising a cap (12) from which at least one bl...
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WO/2007/072817A1 |
A substrate conveying method and a substrate conveying apparatus that arte used to convey a substrate such as a wafer, reticle, etc., and an exposure apparatus used for lithography of a semiconductor integrated circuit etc. and heating t...
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WO/2007/070511A1 |
A process and system for continuous flow-through dip-coating of a workpiece (8) requires the introduction of the workpiece in a porous coating basket (7) at a first side (15) of a coating chamber (5) and the removal of the coated workpie...
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WO/2007/068977A1 |
A stain inhibitor, which acts to neutralise alkali leached to the surface of a sheet of glass in the presence of water is disclosed. The stain inhibitor comprises a buffered, non-acidic compound, with a pKa value of between 6.0 and 10. P...
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WO/2007/063817A1 |
A treatment bath section (10) of an electrolytic plating apparatus (1) is provided with a hollow rotating shaft (23) horizontally arranged on the upper side of a plurality of treatment baths (42-47). The hollow rotating shaft (23) is con...
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