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WO/2010/063264A1 |
The invention relates to a method and to a device for reversing the feeding of a sputter coating system, particularly when coating a photovoltaic module, in clean rooms, having the following characteristics: a) a transport frame (11) for...
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WO/2010/062066A2 |
Disclosed is a conveying plate in which the left and right side surfaces and the upper and lower surfaces of upper pieces are coupled in such a way that an air stream flows through the fine gaps formed between the upper pieces, to thereb...
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WO/2010/062963A2 |
Apparatus and methods relating to a self cleaning belt conveyor for transporting a substrate through a chamber are provided. One embodiment of the apparatus provides a belt conveyor apparatus for transporting a substrate through a chambe...
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WO/2010/058689A1 |
A non-contact conveying device which can be produced without an increase in production costs, which can be operated without an increase in operating costs, which can be installed without limitation of place, which prevents an object bein...
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WO/2010/057291A1 |
An apparatus and a method are described for manufacturing and/or packaging of multiple items simultaneously, in particular the handling and placement for packaging of the items on an assembly line. In particular, the apparatus and method...
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WO/2010/054479A1 |
A universal container carrier includes a base plate, and a pair of support frames coupled to the base plate. At least one of the support frames is configured to move relative to the other support frame. Each support frame comprises at le...
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WO/2010/055851A1 |
To provide a substrate processing system which can increase an interval between various processing devices connected to the side surface of a transfer module, exhibit an excellent maintenance property, avoid deterioration of the throughp...
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WO/2010/042448A2 |
A method and apparatus for a transfer robot that may be used in a vacuum environment is described. The transfer robot includes a lift assembly comprising a first platform and a second platform coupled to the first platform by a plurality...
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WO/2010/041492A1 |
A glass substrate packaging device is provided with a placing station where glass substrates (4) are placed on protective sheets (3), a stacking station where the protective sheets (3) and the glass substrates (4) are alternately stacked...
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WO/2010/037366A1 |
Method and device for loading a container with products which are made up of individual thin sheets of glass (1) of a large surface area or with individual sheets of glass (1), in particular photovoltaic modules, TFT screens or component...
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WO/2010/038272A1 |
Provided is a substrate holder holding apparatus which is small with a simple structure. The substrate holder holding apparatus is provided with first and second holding mechanisms (5, 7), which are stored in a chamber and hold a plurali...
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WO/2010/036993A1 |
Non-contact, liquid-ejecting bearings (3) are provided for conveying flexible glass sheets (13), such as LCD substrates, at high conveyance speeds, e.g., speeds of 15 meters/minute and above. The operating parameters and physical propert...
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WO/2010/035786A1 |
A suction sheet (1) to be attached to a suction surface (4a) of a suction device (4) for vacuum-sucking an object, said suction sheet (1) comprising a substrate (2) and a porous body (3). The substrate (2) has one surface (2a) and the o...
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WO/2010/025706A1 |
Disclosed are a device and a method for picking up glass plates from at least one production line in order to convey said glass plates on to a storage housing (1) or a coating plant (22). Said device and method have the following feature...
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WO/2010/026733A1 |
A substrate transfer apparatus is provided with: trays (4a, 4b) which hold substrates (3a, 3b); a carrier (20) which moves on a transfer path (7) with a bearing (guide member) (6) between the carrier and the transfer path; and a driving ...
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WO/2010/026820A1 |
A levitation unit having a rocking mechanism, wherein a rockable body is less susceptible to be unexpectedly tilted by the weight thereof, so that damage to a workpiece is suppressed. A rocking mechanism is configured such that a spheric...
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WO/2010/025705A1 |
Disclosed are a method and a device for conveying large-size thin glass plates in clean-room conditions for the large-scale production of electro-optical products, in particular photovoltaic modules or TFT screens. Said method and device...
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WO/2010/024888A2 |
Non-contact manipulating devices and methods can include a fluid distribution member including a first fluid port configured to dispense fluid and create a Bernoulli effect to attract an article to be manipulated by the manipulating devi...
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WO/2010/021547A1 |
A conveyor assembly (100) suitable for use in a substrate processing system (800), comprising: at least one substrate carrier (108) having a substrate-carrying surface (109) for supporting at least one substrate;a processing track; a ret...
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WO/2010/021071A1 |
A glass plate working apparatus is provided with a glass plate support section (20a) of a loading conveyor (7), a glass plate support section (20b) of a cutting section (2), a glass plate support section (20c) of a bending and cutting se...
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WO/2010/016588A1 |
Provided are a board holding device allowing a board held by the device to be accurately positioned by using a simple structure, capable of sucking the board with a sufficient sucking force, and not causing the board to come out of posit...
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WO/2010/016505A1 |
A sample conveying mechanism which minimizes damage to a sample such as particularly a photomask (17). A sample conveying mechanism provided with a sample holding mechanism for holding and suspending a sample, wherein portions (either a...
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WO/2010/017340A2 |
Embodiments of the present invention relate to apparatus and method for supporting and transferring large area substrate in a vacuum condition. One embodiment of the present invention provides an apparatus comprising one or more end effe...
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WO/2010/013549A1 |
An apparatus (10) for transferring a board-like work is provided with a multijoint robot (11), which has a series of movable arms (13) having multiple joints and a holding section (23) for holding and acquiring one surface of a board-lik...
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WO/2010/010159A1 |
The invention relates to a removable protective coating deposited over at least a portion of the surface of a vitreous substrate. The removable protective coating is a polymeric film based on polyvinyl alcohol which contains natural inor...
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WO/2010/004800A1 |
In a process of conveying an object to be conveyed, contact of the object with a base body and a swirl flow forming body is avoided to prevent damage to the object. A swirl flow forming body (1) provided with a through-hole (11) penetrat...
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WO/2009/148497A2 |
A glass sheet guidance system includes a guidance member (22) having a small contact area with the glass sheet (12) and being taut to provide guidance to the glass sheet. In order to provide consistent guidance, even in environments wher...
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WO/2009/148070A1 |
An inexpensive stage with alignment function capable of accurately and easily positioning an object to be treated particularly in θ direction even if the object to be treated is heavy. A treatment device comprises the stage with an alig...
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WO/2009/143473A1 |
A signature transport device (100) is provided. The signature transport device (100) includes a saddle conveyor (22) for transporting signatures (50), an escalator tucker (20) for lifting the signatures (50) off the saddle conveyor (22) ...
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WO/2009/142197A1 |
Provided is a vacuum processing apparatus which suppresses cost and is easily controlled. The vacuum processing apparatus is provided with a vacuum section (2) of which inside is in a vacuum state; a placing section (3) which is arrange...
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WO/2009/142133A1 |
Provided is a substrate stage which can transfer a substrate at a high speed. In the substrate stage (10), auxiliary placing tables (12a-12d) are attached to a main placing table (11), and lower rails (131, 132) are arranged from over t...
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WO/2009/139540A2 |
The present invention relates to a non-contact type vacuum pad which is used for holding articles in a vacuum conveying system. The vacuum pad of the present invention comprises a main body, an air guide, and a discharge pathway formed b...
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WO/2009/130790A1 |
Films are easily formed on even substrates having different shapes and sizes by a same apparatus, by using a tray even in a chamber wherein the substrates are temporarily arranged for transfer between the atmospheric side and a film form...
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WO/2009/128698A1 |
A die sorter for sorting a semiconductor dice is provided. The die sorter comprising of a rotary turret module (19) with indexing mechanism for die sorting; the rotary turret module (19) is further coupled with a motor for generating rot...
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WO/2009/126021A2 |
The present invention provides a method for producing solar cells, comprising the steps of - providing silicon containing vitreous substrates, each provided with an electrically conductive material on at least one side thereof, - success...
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WO/2009/125615A1 |
An article transportation facility which stores an article while preventing, with the article supported by an article support, obstruction of the flow of purified air from above to below. The article support (28) has a movable body (30) ...
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WO/2009/123450A1 |
The present invention relates to an etching arrangement (1) for etching a silicon wafer (6) having an upper surface and a lower surface. The etching arrangement (1) comprises: an etching bath (2) containing an etching solution (3), at le...
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WO/2009/119580A1 |
Provided are a processing apparatus and a processing method wherein work processing efficiency is improved by improving efficiency of operations of carrying in and carrying out a work to and from a processing chamber. The processing appa...
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WO/2009/117983A1 |
The invention relates to a device and method for fixing glass sheets in a superclean room for feeding a sputter system, comprising the following: a) a roller drive (12), designed to convey a transport frame (19) to a centring unit that c...
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WO/2009/118483A2 |
The invention relates to a device (8) for packaging and conveying components (3) that uses a heat-formed bearing strip (1) provided with cells (2). The cells preferably all have the same standard size, and the components (3) are maintain...
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WO/2009/119377A1 |
Provided is a non-contact carrier device which can maintain a high-precision floating height while reducing flow rate of fluid and energy consumption. A non-contact carrier device (40) is provided, on the carrying surface of a substrate ...
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WO/2009/116460A1 |
Provided is a substrate transfer process apparatus which can perform high-speed process to a substrate. A placing table (40) whereupon a substrate (7) is to be placed is provided with a board-like main body (41), and a recessed section (...
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WO/2009/112770A1 |
The invention relates to a scaleable workshop for assembling automobiles that comprises: a vehicle assembly flow; a vehicle control flow located downstream from the assembly flow and including a plurality of control lines (20-22) automat...
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WO/2009/110552A1 |
A noncontact transfer apparatus is provided with a static pressure table which floats upward a subject (S) to be transferred; a pair of transfer units (10A, 10B) having a vibrating plate (11) and an actuator (12); and a moving apparatus ...
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WO/2009/107728A1 |
Provided is a transfer apparatus (30) having an improved throughput in substrate transfer without increasing the dimensions of the apparatus. The transfer apparatus (30) is provided with a transfer tray (17) which transfers the substrate...
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WO/2009/103400A1 |
An overhead conveyor system for transporting articles, especially for transporting vehicle bodies, in a treatment line comprises at least one transport carriage (208) which has a fastening device (212) to which at least one article (204)...
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WO/2009/104345A1 |
Disclosed is a laminate joining apparatus jig comprising a positioning portion and a supporting portion. The positioning portion has a positioning face formed to contact the edge of a positioning object substrate. The supporting portion ...
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WO/2009/103401A1 |
An overhead conveyor system for transporting articles, especially for transporting vehicle bodies, in a surface treatment line comprises at least one transport carriage (208) which has a fastening device (212) to which at least one artic...
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WO/2009/099107A1 |
A robot hand (3) for substrate transportation can stably hold a substrate (S) even if the substrate (S) has a warp. A first seat surface (6) on which the outer periphery of the lower side of the substrate (S) is seated is provided to the...
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WO/2009/094995A1 |
The invention relates to a method and device for changing the position of large-area glass plates which are stationary or moving, having the following features: one or more devices located on a level plane, each having a plurality of suc...
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