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JP4352743B2 |
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JP4331294B2 |
A system is disclosed formed of one or more getter devices in form of sintered bodies of getter powders or deposits of getter material onto a metal support, to be arranged in the work area of process chambers for the deposition of thin l...
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JP2009197602A |
To provide a vacuum pump device having a function for appropriately forecasting a service life state and the replacing timing of electronic components such as a semiconductor power switching element and an electrolytic capacitor used for...
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JP4319230B2 |
A sleeve assembly (12) for thermally interconnecting a pulse tube, two stage cryocooler (14) with a superconducting device (16) includes a heat transfer cylinder (32), a heat transfer receptacle (30) and a wall extending therebetween to ...
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JP4303811B2 |
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JP4303886B2 |
A filter standpipe is mounted within a relief conduit of a cryopump. The relief conduit is joined to an exhaust conduit, and the exhaust conduit is joined to a housing which defines a vacuum chamber. The relief conduit and exhaust condui...
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JP4304450B2 |
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JP4301532B2 |
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JP2009156220A |
To provide a cryopump and a regeneration method thereof capable of shortening the regeneration time by vaporizing residual water inside of a cryopump from a liquid condition without solidifying it and exhausting it in a regeneration proc...
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JP4297975B2 |
A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator ...
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JP4287422B2 |
A cryopump includes a thermal shield where a first condensing panel is provided; and a cryocooler connected to the thermal shield; wherein the thermal shield is divided into a plurality of members including a first member and a second me...
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JP4283915B2 |
A cold trap includes a fluid conduit having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A cryopumping array ...
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JP2009133231A |
To increase sealing function between an inner surface of a cylinder and an outer surface of a piston with a simple structure for providing high degree of vacuum in an evacuation chamber and avoid increase of slide resistance of the pisto...
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JP2009133232A |
To materialize a low cost exhaust means capable of quickly reaching pressure of high degree of vacuum by increasing exhaust speed and of reducing initial cost and running cost such as necessary power.This reciprocating vacuum pump 1 is p...
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JP4276744B2 |
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JP4274648B2 |
For simultaneously controlling a plurality of cryopumps, one processor and communication conversion sections of the respective cryopumps are connected to each other with a communication network. The processor and a host computer are conn...
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JP2009114984A |
To provide a vacuum pump device capable of considerably reducing power consumption under a condition that vacuum is comparatively high.In the vacuum pump device where an intake port and an exhaust port are spatially communicated with eac...
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JP4266802B2 |
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JP4261252B2 |
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JP2009085242A |
To obtain a vacuum pump capable of surely maintaining the fully-closed state of a vacuum pump by a simple constitution without providing a conventional automatic leak mechanism.This valve comprises a valve housing 34 put in a middle of a...
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JP4252141B2 |
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JP4247099B2 |
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JP2009062870A |
To provide a small lightweight air pump having an air storage tank.The expansion and contraction of the volume of a piston chamber 25 are repeated by a piston 27 driven reciprocally. While sucking outside air by opening driving of a firs...
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JP4241088B2 |
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JP2009510321A |
A method of pumping a gas stream containing a condensable species and a light gas and an apparatus therefore, the method comprising the steps of conveying the gas stream to a multistage vacuum pump comprising an inlet stage and an exhaus...
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JP4232505B2 |
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JP4228840B2 |
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JP2009030610A |
To prevent the casing of a vacuum pump from being broken by an internal pressure.This safety device for a vacuum pump is arranged to be connected to a duct putting the interior of the casing of the vacuum pump in communication with the o...
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JP4219450B2 |
A vacuum pumping system for use with a process chamber (1), comprising a first vacuum pump (2) whose inlet is adapted for communication via a first line with a chamber outlet and a further vacuum pump (3) whose inlet is adapted for commu...
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JPWO2007010851A1 |
In order to provide a vacuum system that can contribute to energy saving by making the number of revolutions of the vacuum pump appropriate when performing a predetermined process in the vacuum vessel, the vacuum pump controller (33) of ...
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JP2009019501A |
To shorten the start time and the regeneration time of a cryotrap while operating a refrigerator by adopting a miniaturized mechanism in which an exhaust panel is thermally separated from and connected to a cooling stage.This cryotrap 1 ...
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JP2009501869A |
In an evacuation pumping device with primary force pump(s) (1) and secondary suction pump(s) (2) in series, driven by first and second electric motors (1b, 2b) with speeds modifiable by an electronic control module (3), the module has co...
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JP4210206B2 |
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JP2009002508A |
To provide a load control device which inhibits the deterioration of an object to be controlled, and of which manufacturing costs and running costs are low with a simple structure while which reduces sharply energy charges needed for con...
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JP4201620B2 |
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JP2008297927A |
To provide a cryopanel manufacturing method properly joining respective members when manufacturing a cryopanel without causing problems of low temperature brittleness and the deformation of the members.The method of manufacturing the cry...
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JP2008286067A |
To provide a gas multiple stage pressurizing device capable of operating in a high pressure zone and using components equivalent to components used in a low pressure zone, and extending lifetime of components.A plurality of gas compresso...
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JP4187559B2 |
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JP4182905B2 |
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JP2008274865A |
To improve maintenance efficiency of a cryopump performing a maintenance process by supplying a computer for maintenance with operation data of the cryopump, and a maintenance method for the cryopump.This cryopump system includes a plura...
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JP4180265B2 |
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JP4179955B2 |
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JP4172005B2 |
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JP4171026B2 |
A sputter ion pump includes one vacuum chamber, two parallel anode poles and one cold cathode electron emitter. The vacuum chamber includes at least one aperture located in an outer wall thereof. The two parallel anode poles are position...
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JP2008248798A |
To provide a gas booster capable of extending maintenance cycle by extending a lifetime of a bearing of a gas compressor.This booster is provided with an air compressor 2, an air tank 3 storing compressed air, a gas separating means 5 se...
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JP2008248846A |
To provide a gas booster/compressor suppressing waste of electric power.The gas booster/compressor comprises: a gas compressor 14 rising pressure of product gas with pressurized state supplied from a gas supply source 12; and a storage t...
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JP4166491B2 |
In a vacuum pumping system according to the invention, the Roots or claw multistage dry primary pump discharges into an outlet stage including an additional piston or membrane pump connected in parallel with a preliminary evacuation pipe...
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JP2008232029A |
To provide a pump device capable of reducing the vibration transmitted to a bellows by a simple and adjustable structure.A vibration control damper 350 is composed of a rubber member 306 for damping vibration and the bellows 302 for main...
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JP4159183B2 |
A gas ballast system for multistage vacuum pumps, e.g. for piston pumps and membrane pumps, has flow restrictions (10) to bleed gas into the connecting duct (5) between the pump stages and with another flow restriction (10') to bleed gas...
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JP2008223538A |
To provide a cryo pump capable of preventing a drop in exhaust capability and cooling capability during operation of the cryo pump when a large amount of water is exhausted, thereby enabling shortening of regeneration time and long-term ...
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