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JP2016211441A |
To provide a power consumption control device for controlling power consumption of a vacuum pump that controls power consumption of a vacuum pump and can reduce installation cost and maintenance cost.A power consumption control device 1 ...
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JP6031451B2 |
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JP6031651B2 |
A method for reducing an internal pressure of a vacuum chamber while preventing impurity contamination within the vacuum chamber as much as possible is provided. The method includes: rough pumping reducing an internal pressure of a vacuu...
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JP6021276B2 |
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JP6021095B2 |
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JP6016159B2 |
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JP6013886B2 |
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JP6009193B2 |
The present invention relates to a vacuum evacuation apparatus which can be mounted in a posture that can freely be selected a vacuum evacuation apparatus for evacuating a container from an atmospheric pressure to a high vacuum or less i...
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JP5996834B2 |
The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The ga...
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JP5994080B2 |
To provide a vacuum device and the like which can eliminate impurity contamination on the surface of an organic film material as much as possible.The vacuum device includes a vacuum chamber 1 for housing an organic film material, a vacuu...
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JP2016153617A |
To shorten a regeneration time of a cryopump.A cryopump system includes a cryopump 10, and a regeneration control unit 102 configured to control the cryopump 10 according to a regeneration sequence containing discharge processing of disc...
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JP2016153620A |
To provide an evacuation apparatus having a configuration of serially connecting in multistage a vacuum pump and a high vacuum pump that compress and exhaust gas by rotation of rotors, and capable of suppressing loudness of noise.An evac...
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JP2016524105A |
Start valve (100) for fluid actuating machine (200) in vacuum system (1000). This start valve (100) is a spline-coupled actuating piston to the stem (26) and a valve body (10) provided with at least one opening (17) through which gas can...
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JP2016142245A |
To provide an airtight connection component capable of evaluating an inner environment and air-tightness performance of a bag-like body such as a sheath material of a vacuum heat insulating material under a high reproducibility and a met...
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JP5963459B2 |
A cryopump includes a housing, an electrical control unit which controls the cryopump, a purge valve provided on a passage between an external purge gas source and the inside of the housing, a rough valve provided on a passage between an...
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JP5956754B2 |
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JP5939514B2 |
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JP5934239B2 |
The present invention provides a system (1) for maintaining a high vacuum comprising: a high vacuum pump (3) having an input (6) that is connectable to a vacuum enclosure (2) and an output (8); and a vacuum vessel (4) connected to the ou...
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JP5913414B2 |
A method of manufacturing a semiconductor device by processing a substrate by supplying a processing space with a gas dispersed in a buffer space disposed at an upstream side of the processing space is provided. The method includes (a) t...
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JP5907965B2 |
A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrige...
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JP5906568B2 |
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JP5902740B2 |
A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the v...
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JP5887135B2 |
The present invention relates to a vacuum pumping system (10) which comprises: a vacuum pumping mechanism (12) and a motor (14) for driving the vacuum pumping mechanism. Means (16) are provided for determining a cumulative load on the va...
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JP5877934B1 |
Provide an oil diffusion pump that takes work safety into consideration during overhaul. The oil diffusion pump 50 has a casing 51 as a pump body. The casing 51 includes a tubular casing main body 51a having an open bottom and a lower li...
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JP5873075B2 |
The present invention relates to a system and a control method for the piston of a resonant linear compressor (100), especially designed for operating at their maximum efficiency, such a system being capable of actuating said compressor ...
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JP5868224B2 |
A cryopump system includes a cryopump configured to perform a preparatory operation including a cooldown from a room temperature to a cryogenic temperature and to perform a vacuum pumping operation at the cryogenic temperature, a compres...
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JP5862943B2 |
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JP5854216B2 |
A centrifuge includes a vacuum pump machine configured of an auxiliary vacuum pump and an oil diffusion pump for exhausting gas inside a rotary chamber to outside, in which a rotor rotates at high speed. In the centrifuge, a thermistor f...
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JP5846966B2 |
A method for regenerating a cryopump includes stopping a pressure sensor for the cryopump, starting to heat a cryogenic surface for adsorbing gas molecules, starting the rough evacuation of the cryopump while the pressure sensor is stopp...
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JP5838120B2 |
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JP5822747B2 |
A cryopump includes a low-temperature cryopanel, a high-temperature cryopanel provided outside the low-temperature cryopanel, and a housing provided outside the high-temperature cryopanel. The high-temperature cryopanel includes an exten...
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JP5820672B2 |
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JP2015209844A |
To provide an ion pump.This ion pump comprises at least one electron source constructed to discharge electrons into an ion pump; at least one cathode arranged at a position where it comes from at least one electron source across the ion ...
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JP2015203304A |
To improve a heat transfer efficiency to a porous body, using more simple structure in a thermal transpiration flow pump.A thermal transpiration flow pump 14 comprises a porous body 40 and a wall surface 22 for providing a temperature di...
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JP5808691B2 |
A cryopump includes: a first panel to be cooled by a first stage of a refrigerator; a second panel to be cooled by a second stage of the refrigerator; a panel temperature sensor provided with the first panel and/or the second panel; a st...
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JP2015185568A |
To provide a nitrogen temperature raising unit capable of preventing the coagulation and deposition of a sublimable substance and capable of being easily installed in already-operating facilities.There is provided a nitrogen temperature ...
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JP5799058B2 |
A negative pressure pump (10) has: a casing (20) into which a drive shaft (100) is inserted; a pump portion (30) that produces negative pressure as a result of the rotation of the drive shaft being transmitted to a driven shaft (40); a d...
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JP2015165497A |
To provide an ion pump of micro size, in which power and life are improved.In a micro ion pump 10 having a plurality of thin film edge field emitters 100-1, -5, a first gate electrode 115, a second gate electrode 110, and a high voltage ...
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JP5779253B2 |
A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about ...
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JP5776172B2 |
The inside in an engine case is sucked to turn a pressure in the engine case into a negative pressure. A breather chamber is disposed above a vacuum pump. An intake port of a blow-by gas is disposed in an upper portion of the vacuum pump...
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JP5769722B2 |
A pumping device and method are described. The pumping device comprises a dry rough vacuum pump equipped with a gas inlet connected to a vacuum chamber, a gas outlet leading to a conduit and an ejector. The pumping method comprises pumpi...
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JP5764337B2 |
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JP5764096B2 |
A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stag...
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JP5756097B2 |
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JP5755553B2 |
An air compressor with enhanced air compressing effect comprises a mounting chassis (2) with a coupling aperture, a piston (5) having a piston rod with a crankpin linking bore (510) and a piston head (52) with an air acting face, a cylin...
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JP5752879B2 |
A highly reliable combined bearing (10) capable of achieving equal and sufficient lubrication of a plurality of rolling bearings with a simple and compact structure is provided. The combined bearing includes a first rolling bearing (11) ...
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JP2015520315A |
To greatly improve the stability of an assembly. A pump or rotary compressor comprises a casing (1) formed by two housings in which two diametrically opposed cylinders (2) are connected to which a piston (3) slides. The piston is attache...
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JP5748682B2 |
A cold trap includes two individually controllable cooling units. The cold trap is provided in an evacuation path for connecting a vacuum chamber to a turbomolecular pump, The first cooling unit includes a first panel unit provided in th...
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JP2015110214A |
To provide a non-evaporation type getter material having an improved gas adsorption rate, and a non-evaporation type getter pump having an improved exhaust rate with a reduced manufacturing cost and a reduced repair cost.A non-evaporatio...
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JP5733994B2 |
To provide a piston capable of improving a durability life of a seal member, and to provide a vacuum pump provided with the piston.The piston 5 includes a piston body 51, the seal member 52, a seal member fixing sheet 53 and a clamping p...
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