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JP6184832B2 |
The invention provides a gate valve apparatus which can ensure connection between a valve body and a treatment container, reduce damage to the valve body and the container, and inhibit generation of metal particles. A valve base plate (2...
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JP6183971B2 |
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JP2017141932A |
To provide a flow rate control valve which is improved in seal performance by removing foreign matters of a seal part while suppressing the accumulation of the foreign matters on a magnet.A flow rate control valve has: a housing 80 havin...
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JP6175716B2 |
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JP6178845B2 |
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JP6175630B2 |
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JP6175811B2 |
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JP6172442B2 |
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JP6175388B2 |
A pressure balanced solenoid operated valve includes a solenoid portion having a coil. A valve member portion is connected to the solenoid portion. The valve member portion has a body including: first and second valve seats; a first cavi...
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JP6173818B2 |
A valve (1), in particular a vacuum valve, comprising a valve plate (2) for closing an opening (3), in particular of the valve (1), and comprising at least two piston cylinder units (4, 5) for pressing the valve plate (2) against a valve...
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JP6165520B2 |
A one-way valve for medical infusion lines and the like, comprising a first tubular connector (2) and a second tubular connector (3), which define, respectively, an upstream passage (4) and a downstream passage (5), which are coaxial and...
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JP6164091B2 |
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JP6163800B2 |
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JP6163604B2 |
A fluid control valve is connected to a wet gas flow passage in order to control a flow of a wet gas, and includes an introduction passage for introducing the wet gas into the fluid control valve, a filter including mesh for removing for...
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JP6160121B2 |
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JP6161356B2 |
A pressure reducing valve has a valve rod with a valve element member fitted over the valve rod. A fluid discharging structure is defined in an outer wall surface of the valve rod, or in an inner wall surface of the valve element member ...
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JP6160924B2 |
To enable a lock mechanism for locking a valve plate at a sealed position of a gate opening to adjust the compression amount of a seal member, in a gate valve where the gate opening is sealed by vertically moving the valve plate to a val...
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JP6160923B2 |
In a valve box that makes up a gate valve, a balance room is disposed on one side wall that faces toward a processing chamber. In the balance room, a first seal member is provided to surround a first pathway, and a second seal member is ...
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JP6162487B2 |
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JP6156095B2 |
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JP6154285B2 |
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JP6154178B2 |
Valve (1), in particular vacuum valve, having a passage opening (2) and a closure member (3), it being possible for the closure member (3) to be moved by a valve drive (4) of the valve (1) in a closing direction (5) from an open position...
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JP6150388B2 |
To provide a gate valve capable of remarkably reducing particles and a discharge gas generated in operating the gate valve, and a chamber including the same.A gate valve 1 opens and closes an opening portion 7 by operating a seal unit 4 ...
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JP6145445B2 |
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JP6138014B2 |
To facilitate liquid discharge from a housing inside and further suppress entry from the outside, for a liquid discharge hole penetrating through the housing of an EGR valve.For a liquid discharge hole 30, the hole diameter of a large-di...
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JP2017512946A |
To provide a valve rod capable of further making a vacuum valve more compact. A valve rod (12) for a vacuum valve has a first connecting portion (40) for the closing element (5) of the vacuum valve and a second connecting portion (40) fo...
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JP2017512285A |
The present invention is a vacuum valve (1), which is a screw element (9a;) that mechanically connects and connects the first component (10) of the vacuum valve (1) to the second component (11). 9 b) relating to a vacuum valve (1) with. ...
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JP2017084781A |
To provide an antistatic cover for fluid apparatus capable of imparting sufficient antistatic performance to a fluid apparatus made of insulating resin.An antistatic cover 1 for fluid apparatus comprises a first cover section 11 includin...
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JP6130705B2 |
A valve housing for a vacuum valve has opposed valve openings (8, 9), which have axes (10, 11) and are surrounded by flanges (6, 7) of the valve housing, these flanges being connected to housing parts (1, 2) of the valve housing. A respe...
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JP6127634B2 |
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JP6125851B2 |
An arrangement having at least one valve, in particular a vacuum valve, with a closure member of the valve for closing a through-opening of the valve and a drive for adjusting the closure member between a closed position, in which the cl...
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JP6118785B2 |
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JP2017510762A |
Passive isolation valves are equipped with one or more nozzles so that the nozzles deliver a stream of gas to the area adjacent to the valve seat in order to remove the accumulated particulate material from the area of the valve adjacent...
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JP6112085B2 |
To provide a trouble diagnosing method and device for servo valves under hydraulic pressure that can more accurately determine the presence or absence of trouble in servo valves under hydraulic pressure and reduce the occurrence of misju...
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JP2017067287A |
To obtain favorable pressure responsiveness and a compact design by accumulatively integrating a valve and a filter, and to surely suppress that a discharge behavior becomes instable due to air bubbles which are accumulated in the filter...
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JP6108463B2 |
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JP6106794B1 |
[Subject] Fluid to which a diaphragm part circulates a fluid channel very much to a dielectric breakdown controls fault which flows out of a diaphragm part. [Means for Solution] Body part 110 by which upper stream side fluid room 114 whi...
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JP2017060929A |
To manually remove a strainer without using a tool or the like in maintenance of the strainer.A stop cock device 50 comprises: a cylindrical strainer 8 which is detachably installed in a first flow passage 61 and removing foreign matter ...
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JP6099898B2 |
The valve has a valve housing (1) including a wall (2) that is provided with an opening (3) for a flow path (F). An outer disk section (9) includes outer and inner surfaces (15, 16), that point radially inward and run parallel to an open...
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JP6101365B2 |
A valve assembly comprises: a valve body including a passageway through which a first gas can be transmitted through the valve assembly; a valve flow control element movable relative to the valve body between an opened position wherein f...
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JP2017053370A |
To provide a valve and a semiconductor manufacturing device that can fine-tune atmospheric pressure in a chamber.A valve according to an embodiment comprises a housing. The housing comprises a first opening part that can be connected to ...
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JP6096145B2 |
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JP6091364B2 |
To reduce the weight of an EGR valve and the number of component of the EGR valve.An EGR valve 1 has a resin housing 2 to be reduced in weight. A frame of the resin housing 2 is constituted by a sheet metal member 3 to secure strength. A...
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JP6090278B2 |
A valve apparatus includes a sleeve which is a hollowed tubular shape, a valve member which is disposed in the sleeve, and a filter. The sleeve includes a ring-shaped groove in an outer wall of the sleeve and a port penetrating the sleev...
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JP2017045176A |
To provide a pressure regulating valve capable of maintaining a pressure regulating function.Disclosed is a multi-stage pressure regulating valve 10 which includes: an upstream pressure regulating valve 1 for decompressing fuel gas G; a ...
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JP6087791B2 |
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JP6086457B2 |
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JP6084492B2 |
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JP6084562B2 |
To provide a hydraulic control valve capable of avoiding the heat deformation of a sleeve at a time of fixing the sleeve to a valve body.A hydraulic control valve comprises: a sleeve 51 axially inserted into a valve body 50 and arranged ...
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JP6075711B2 |
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