Title:
基体のコーティングのための方法および装置
Document Type and Number:
Japanese Patent JP2014506960
Kind Code:
A
Abstract:
The invention relates to a method and device for coating plate-shaped substrates, in particular glass substrates for solar cell production. The method includes heating the substrates, which are moved on transporting shafts through heating and coating chambers, by a different amount on the upper and lower sides, so that the coating temperature can be increased without the substrates becoming too soft to handle. A device is described which is suitable for carrying out the method and has heating and coating chambers, which have independent heating systems, as well as a transport system.
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Inventors:
Hal michael
Richter Hilmer
Bosat stefan
Steiten Ralph
George stefan
Tittel Sebastian
Schade Werner
Richter Hilmer
Bosat stefan
Steiten Ralph
George stefan
Tittel Sebastian
Schade Werner
Application Number:
JP2013553963A
Publication Date:
March 20, 2014
Filing Date:
February 20, 2012
Export Citation:
Assignee:
Zetheev Zoral Gesellschaft Mito Beschlenktel Haftung
International Classes:
C23C14/54; C03C17/09; C03C17/22; C23C14/56; H01L31/06
Domestic Patent References:
| JP2007266626A | 2007-10-11 | |||
| JP2009105130A | 2009-05-14 | |||
| JP2002328381A | 2002-11-15 | |||
| JP2003306226A | 2003-10-28 | |||
| JP2003292154A | 2003-10-15 | |||
| JPH0925575A | 1997-01-28 | |||
| JP2005256094A | 2005-09-22 |
Foreign References:
| WO2010012890A2 | 2010-02-04 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Katsunori Uenishi
Ichiro Torayama
Blacksmith
Katsunori Uenishi
Ichiro Torayama