Title:
INSPECTION APPARATUS, TEMPERATURE CONTROL DEVICE AND TEMPERATURE CONTROL METHOD
Document Type and Number:
Japanese Patent JP2020088204
Kind Code:
A
Abstract:
To provide a temperature adjustment technology of a table in which generation of electrical noise is suppressed.SOLUTION: An inspection apparatus for placing an inspected body on a table and inspecting electrical characteristics of multiple devices formed in inspected body, has a temperature detector for detecting the temperature of the table, a heat generation source provided separately from the table, a cooling part for cooling the table, and a temperature control section for controlling the heat generation source and the cooling part, on the basis of the temperature of the table detected by the temperature detector.SELECTED DRAWING: Figure 4
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Inventors:
ISHIDA YUKI
Application Number:
JP2018221602A
Publication Date:
June 04, 2020
Filing Date:
November 27, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/66
Domestic Patent References:
| JPH10135315A | 1998-05-22 | |||
| JP2008192860A | 2008-08-21 | |||
| JP2018163945A | 2018-10-18 | |||
| JP2006313777A | 2006-11-16 | |||
| JP2000323536A | 2000-11-24 | |||
| JP2005024377A | 2005-01-27 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito