Title:
較正装置及びリソグラフィ装置の放射センサを較正する方法
Document Type and Number:
Japanese Patent JP4303224
Kind Code:
B2
Abstract:
A calibration apparatus is provided for calibrating a radiation sensor in a lithographic apparatus. The calibration apparatus includes a window formed of substantially radiation-transparent material for allowing radiation to pass therethrough to reach the radiation sensor. A first reference sensor is located behind the window, having an active surface abutting the window, for measuring the intensity of radiation which passes through the window. A second reference sensor is located a short distance behind the window, having an active surface facing the window, for measuring the intensity of radiation which passes through the window, a first contamination layer formed on the window, and a second contamination layer formed on the active surface of the second reference sensor. The radiation sensor can be calibrated by combining the measurements from the first and second radiation sensors.
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Inventors:
Johannes Hubertus Josephina Moores
Uve Mick Can
Uve Mick Can
Application Number:
JP2005193839A
Publication Date:
July 29, 2009
Filing Date:
July 01, 2005
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G01J1/00; G01J1/02; G03F7/20
Domestic Patent References:
| JP2003227752A | ||||
| JP2003068637A | ||||
| JP2000346817A | ||||
| JP2000182954A | ||||
| JP2003229358A | ||||
| JP2005183655A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki