Title:
保持装置
Document Type and Number:
Japanese Patent JP6695204
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the uniformity of temperature distribution on a surface of an insulator plate in a holding device.SOLUTION: A holding device comprises: a tabular insulator plate which is made of a predetermined insulation material and has a first surface; and heater electrodes, arranged inside the insulator plate, which are made of a resistance heating element and are respectively connected to a pair of terminals. The holding device holds an object at a position above the first surface of the insulator plate. The holding device further comprises a dummy portion which is arranged, in a direction parallel to the first surface, between a portion of the heater electrodes and another portion of the heater electrodes. The dummy portion is made of a predetermined material having heat conductivity higher than that of the predetermined insulation material, and it may or may not be connected to one of the terminals.SELECTED DRAWING: Figure 5
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Inventors:
Horita
Application Number:
JP2016082611A
Publication Date:
May 20, 2020
Filing Date:
April 18, 2016
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/683; H05B3/68
Domestic Patent References:
| JP2011222256A | ||||
| JP9260474A |
Attorney, Agent or Firm:
Patent Business Corporation Alpha International Patent Office