Title:
1次元ビーム・ブランカ・アレイ
Document Type and Number:
Japanese Patent JP2006508549
Kind Code:
A
Abstract:
A beam blanker array includes a base plate, a plurality of conductor pads, and a ground plate. The conductor pads are arranged in a one-dimensional array on the base plate. The ground plate is coupled to the base plate over the plurality of conductor pads with a gap between the base plate and the ground plate. Each of the plurality of conductor pads forms a beam blanker across the gap with the ground plate.
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Inventors:
Berglund, Shii Nail
Application Number:
JP2004570773A
Publication Date:
March 09, 2006
Filing Date:
November 20, 2003
Export Citation:
Assignee:
Oregon Health & Science University
International Classes:
H01L21/027; G01N23/00; G03F7/20; H01J3/14; H01J3/26; H01J37/00; H01J37/04; H01J37/08; H01J37/09; H01J37/147; H01J37/305; H01J37/317; G01Q40/00
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa