感活性光線性又は感放射線性樹脂組成物、並びに、この組成物を用いた感活性光線性又は感放射線性膜及びパターン形成方法

Title:

感活性光線性又は感放射線性樹脂組成物、並びに、この組成物を用いた感活性光線性又は感放射線性膜及びパターン形成方法

Document Type and Number:

Japanese Patent JP5572570

Kind Code:

B2

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Inventors:

Yusuke Iizuka
Akinori Shibuya
Tango 直紘

Application Number:

JP2011042911A

Publication Date:

August 13, 2014

Filing Date:

February 28, 2011

Export Citation:

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Assignee:

Fuji Photo Film Co., Ltd.

International Classes:

G03F7/039; C08F220/28; G03F7/004; H01L21/027

Attorney, Agent or Firm:

Masatoshi Kurata
Shigeo Takakura
Kono 哲
Makoto Nakamura
Toshihiro Fukuhara
Peak Takashi
Toshiro Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Yukinaga Yasujiro
Naoki Kono
Sunagawa 克
Iseki Mamoru 3
Tatsushi Sato
Okada Kishi
Mihoko Horiuchi
Masanori Takeuchi

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