Title:
DRYER AND DRYING METHOD FOR CLEANING MATTER
Document Type and Number:
Japanese Patent JP3137244
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To generate a large volume of organic solvent mist efficiently even under normal temperature.
SOLUTION: Pure water in a pure water tank 20 is discharged rapidly from drip valves 22a, 22b. Inner pressure of the pure water tank 20 decreases as the pure water is discharged and the valve 39 of a passage 38 interconnecting the pure water tank 20 and an organic solvent mist generating tank 30 is opened automatically to feed high concentration organic solvent mist from the tank 30 into the pure water tank 20. Pure water is discharged at high rate from the drip valves 22a, 22b so that a mixture layer of pure water and organic solvent is not formed on the upper layer of pure water. Liquid drops or a liquid film of pure water and organic solvent is thereby formed by 10 nm-1 μm thick on the surface of a cleaning matter 50.
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Inventors:
Akinari Tanaka
Application Number:
JP10026899A
Publication Date:
February 19, 2001
Filing Date:
April 07, 1999
Export Citation:
Assignee:
Kaijo Co., Ltd.
International Classes:
H01L21/304; F26B5/02; F26B7/00; (IPC1-7): F26B5/02; F26B7/00; H01L21/304
Attorney, Agent or Firm:
Koichi Fujii (1 person outside)
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