To quickly and securely perform the evacuation by limiting rise of a piston, which is provided inside of an actuator cover, with a shaft, and previously adjusting rise of the shaft in response to the intake flow of a vacuum generator with a stopper in a closing degree limiter.
A piston 33, which forms a driving mechanism, is provided over a cam pinion 21 inside of an actuator cover 15, and a top surface of the piston 23 as a pressure receiver surface is faced to an opening 25 formed in the upper part of the actuator cover 15. A closing degree limiter 27 is inserted into this opening 25 so as to be integrally formed with each other, and this closing degree limiter 27 performs limitation of rise of the piston 23 with a shaft 29, and rise of the shaft 29 is previously adjusted by a stopper in response to the intake flow of a vacuum generator. With this structure, since a valve can be full opened on the way of the operation, evacuation can be quickly and securely performed.
| JP2000055233 | PRESSURE CONTROL VALVE |
| JP3737869 | PROCESS GAS TRANSFER UNIT |
KIYONO FUMIYUKI
ONODERA TAKASHI
SUGANO YOICHI
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