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Title:
HOLDER
Document Type and Number:
Japanese Patent JP2014000640
Kind Code:
A
Abstract:

To provide a holder capable of making thickness of an article-to-be-ground uniform by almost perpendicularly directing a force applied to the article-to-be-ground by a holding pad and making the force uniform.

A holder 13 includes a holding pad 15 which is formed of foamable polyurethane, and a ring-shaped frame material 17 which is attached along a peripheral edge of a bottom surface, pressed against an article-to-be-ground, of the holding pad 15 and which is thinner than a wafer W. A cut 21 is formed along an inner periphery of the frame material 17 on the bottom surface of the holding pad 15.


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Inventors:
KAWAMURA YOSHIHIDE
Application Number:
JP2012137840A
Publication Date:
January 09, 2014
Filing Date:
June 19, 2012
Export Citation:
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Assignee:
FUJIBO HOLDINGS INC
International Classes:
B24B37/30
Domestic Patent References:
JPH0758066A1995-03-03
JP2004216485A2004-08-05
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino



 
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