PURPOSE: To measure a face shape quickly and precisely by providing the apparatus with a displacement-amount detection means which detects the relative displacement amount of a probe, an angle detection means which detects the angle of rotation of a rotating scanning operation and a latch means which latches detected data by the displacement-amount detection means.
CONSTITUTION: A swiveling shaft 21 is constant-speed-driven at a speed V0 by the instruction of a control computer, and the edge line of an object 30 to be measured is scanned at a definite speed by an optical probe for an autofocus microscope 20. At this time, a measured swiveling angle θ0 is output, and it is input to A of a comparator 68. In addition, the output of a swiveling-angle detector 57 is input to B of the comparator 68. When the measured swiveling angle θ0 which has been set at this time coincides with the present value of the swiveling angle θ0, an A=B signal is output from the comparator 68. In addition, by the A=B signal, a focused-state signal as the output of a focused-state detector 50, a fine-adjustment slide movement amount as the output of a fine-adjustment movement-amount detector 53 and an angle of inclination as the output of an angle-of-inclination detector 51 are latched by latches 65, 66, 67, they are sent to a computer, and data on one cross section of the object 30 to be measured is acquired.
WATANABE KEIJI
HOSAKA KOTARO
HIGOMURA MAKOTO
YAMAMOTO SEKINORI
NOSE TETSUSHI
NIWA YUKICHI
OWADA MITSUTOSHI
