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Title:
IC TESTING METHOD
Document Type and Number:
Japanese Patent JPS5230174
Kind Code:
A
Abstract:

PURPOSE: An IC testing method with improved reliability which judges renear IC from GR current caused by charge leak in manufacturing.


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Inventors:
MINAMIMURA EIJI
INOUE FUMITO
Application Number:
JP10591875A
Publication Date:
March 07, 1977
Filing Date:
September 03, 1975
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L21/66; G01R31/26; (IPC1-7): G01R31/26; H01L21/66



 
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