Title:
MANUFACTURE FOR THERMAL INK-JET HEAD
Document Type and Number:
Japanese Patent JP3639920
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for a thermal ink-jet head whereby an orifice can be surely worked and a heat generation characteristic of a heat-generating element is made constant.
SOLUTION: A wafer is set in an etching apparatus 20. The wafer is etched while a resistance value of a heat-generating resistance body 5 between a common electrode 2 and one separate wiring electrode 4 is monitored by a control device 21. After an orifice penetrates an orifice plate in the lapse of time from a time point t0 when the etching is started to a time point t1, the etching is continued as it is to form a recess 5-1 and thin the heat-generating resistance body 5. When an initial resistance value Ωu (solid line (a)) of the heat-generating resistance body 5 starts to change (solid line (b)) and becomes a desired resistance value Ωa (time point t2), the control device 21 controls the etching apparatus 20 to terminate the etching. Accordingly, the orifice surely penetrates at one hand and the resistance value of the heat-generating resistance body is set constant at the other hand.
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Inventors:
Katsuzo Uenishi
Junji Shioda
Ichiro Kono
Junji Shioda
Ichiro Kono
Application Number:
JP21519698A
Publication Date:
April 20, 2005
Filing Date:
July 30, 1998
Export Citation:
Assignee:
CASIO COMPUTER CO.,LTD.
International Classes:
B41J2/05; B41J2/135; (IPC1-7): B41J2/135; B41J2/05
Attorney, Agent or Firm:
Yoshiyuki Osuga