To provide a method of manufacturing a thin-film photoelectric conversion module which can shorten the time required for forming a slot.

The thin-film photoelectric conversion module comprises a transparent substrate and a multilayer structure formed on one principal plane of the transparent substrate. The multilayer structure comprises a transparent front face electrode layer, thin-film photoelectric conversion unit, and rear face electrode layer. The multilayer structure constitutes a plurality of thin-film photoelectric conversion cells, which are connected serially to each other. The method of manufacturing the thin-film photoelectric conversion module includes a process, where an array of a plurality of beam spots 52a, 52b is formed on one thin film 51 of the thin films which constitute the multilayer structure, a plurality of laser beams are applied so that the array lies within a region having a diameter of 2 mm, and a recess 54 is formed in at least one thin film 51, by relatively moving the array of the beam spots 52a, 52b and the transparent substrate.