Title:
ナノシリンダー・アレイ
Document Type and Number:
Japanese Patent JP2004502554
Kind Code:
A
Abstract:
Pathways to rapid and reliable fabrication of nanocylinder arrays are provided. Simple methods are described for the production of well-ordered arrays of nanopores, nanowires, and other materials. This is accomplished by orienting copolymer films and removing a component from the film to produce nanopores, that in turn, can be filled with materials to produce the arrays. The resulting arrays can be used to produce nanoscale media, devices, and systems.
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Inventors:
Tominen, Mark
Shotter, Jörg
Torun-Albrecht, Thomas
Russell, Thomas Peas.
Shotter, Jörg
Torun-Albrecht, Thomas
Russell, Thomas Peas.
Application Number:
JP2001569064A
Publication Date:
January 29, 2004
Filing Date:
March 22, 2001
Export Citation:
Assignee:
University of Massachusetts
International Classes:
B82B3/00; B05D3/02; B82B1/00; C08J9/00; C08L53/00; C09D153/00; C30B29/60; G11B5/65; H01F10/12; H01L21/31; H01L21/326; H01L21/469; H01L21/479; H01L43/08; H01L43/12; C08L; (IPC1-7): B82B3/00; B82B1/00; G11B5/65; H01F10/12; H01L43/08; H01L43/12
Other References:
JPN7010004005, ＭＡＮＳＫＹ ｅｔ ａｌ．, "Ｎａｎｏｌｉｔｈｏｇｒａｐｈｉｃ ｔｅｍｐｌａｔｅｓ ｆｒｏｍ ｄｉｂｌｏｃｋ ｃｏｐｏｌｙｍｅｒ ｔｈｉｎ ｆｉｌｍｓ", Ａｐｐｌ． Ｐｈｙｓ． Ｌｅｔｔ．, 19960429, ６８（１８）, ２５８６−２５８８, US, Ａｍｅｒｉｃａｎ Ｉｎｓｔｉｔｕｔｅ ｏｆ Ｐｈｙｓｉｃｓ
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda