Title:
PEELING AGENT COMPOSITION
Document Type and Number:
Japanese Patent JP3477390
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a peeling agent composition having superior peelability even to a resist modified or hardened by high energy processing by incorporating polycarboxylic acid and/or its salt and water and controlling its pH less than a specified value.
SOLUTION: This peeling agent composition contains the polycarboxylic acid and/or its salt and water and has a pH <8, and the polycarboxylic acid is represented by the formula; B-[(R1)p-(COOH)q]r in which R1 is a 1-20C straight or branched or cyclic saturated or unsaturated hydrocarbon group optionally substituted by 1-5 O or N or S atom and the H atom combined with C atom of R1 is optionally substituted by an -OH or NH2 group or the like; one or more -COOH groups may be combined with the same C atom of R1; (p) is 0 or 1; (q) is an integer of 1-40; (r) is 1, 2, or 3 and q+r=≥2; and B is absent or a -O- or -CO- group or the like.
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Inventors:
Mami Shirota
Kozo Kitazawa
Eiji Kashihara
Kozo Kitazawa
Eiji Kashihara
Application Number:
JP1467799A
Publication Date:
December 10, 2003
Filing Date:
January 22, 1999
Export Citation:
Assignee:
Kao Corporation
International Classes:
H01L21/027; C09D9/00; G03F7/42; (IPC1-7): G03F7/42; C09D9/00; H01L21/027
Domestic Patent References:
| JP9197681A | ||||
| JP1055993A | ||||
| JP7271056A | ||||
| JP4361265A | ||||
| JP1152588A | ||||
| JP11316464A |
Other References:
【文献】国際公開00/33371(WO,A1)
Attorney, Agent or Firm:
Yoshinori Hosoda
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