Title:
PROBE UNIT, MANUFACTURING METHOD OF PROBE UNIT, AND INSPECTION METHOD OF ELECTRONIC DEVICE
Document Type and Number:
Japanese Patent JP2007047059
Kind Code:
A
Abstract:
To provide a probe unit capable of being aligned highly accurately with an electronic device which is an inspection object, its manufacturing method, and an inspection method of the electronic device.
This probe unit is equipped with a substrate; a lead wire fixed to the substrate, whose tip part is exposed to the first surface of the substrate; and a conductive contact part formed on the tip part of the lead wire, and projecting from the second surface of the substrate.
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Inventors:
HIYAMA KUNIO
OKUMIYA YASUO
OKUMIYA YASUO
Application Number:
JP2005232984A
Publication Date:
February 22, 2007
Filing Date:
August 11, 2005
Export Citation:
Assignee:
YAMAHA CORP
International Classes:
G01R31/26; G01R1/073
Attorney, Agent or Firm:
Masaki Hattori
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