To provide a method for readily and rapidly forming a thin membrane having regulated crystal orientation on a substrate by forming an amorphous precursor membrane on the substrate, heating and firing the obtained amorphous precursor membrane by an infrared lamp only from the substrate side to crystallize the amorphous precursor membrane.

A platinum layer or a multilayered metallic layer including platinum is formed as an under electrode of a ceramic thin membrane on a substrate. A thin membrane having more superior piezoelectric characteristics is formed on the platinum layer satisfying the formula I(111)/ΣI(hk1)≥0.9 [θis the angle of incidence in a diffracted pattern of X rays (Cu-Kα) by a wide angle method; ΣI(hk1) is the sum of diffracted intensity peaks in the region of 0°≤2θ≤80°; I(111) is a diffracted intensity of (111) face], on the platinum layer satisfying the formula I(200)/ΣI(hk1)≥0.9 [I(200) is the diffracted intensity of (200) face], or on the layer having island-like Ti layer on the platinum layer.