Title:
PRODUCTION OF OPTICAL DIFFRACTION ELEMENT
Document Type and Number:
Japanese Patent JP3804734
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To produce an optical diffraction element having necessary optical characteristics with a relatively simple apparatus using a low-cost high molecular material.
SOLUTION: A polymer substrate 6 disposed on a stage 5 is irradiated with laser light 2 from a laser device 1 spatially and selectively through a galvano- mirror 3, an fθ mirror 4 or a reflecting mirror, a mask, etc. The energy of the laser light 2 is adjusted appropriately and the surface of the polymer substrate 6 is altered by thermal or photochemical action to form a fine pattern. In order to attain spatial and selective irradiation, laser light 2 is radiated through the image of a photomask having a slit pattern or beam scanning is carried out. In another way of patterning, the stage 5 is periodically moved to shift the irradiation position and the fine pattern is formed on the surface of the substrate by laser beam machining.
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Inventors:
Yamada Tai History
Application Number:
JP33205798A
Publication Date:
August 02, 2006
Filing Date:
November 05, 1998
Export Citation:
Assignee:
株式会社リコー
International Classes:
G02B5/18; (IPC1-7): G02B5/18
Domestic Patent References:
| JP10059746A | ||||
| JP10068807A | ||||
| JP5326965A | ||||
| JP10118569A | ||||
| JP8254608A |
Attorney, Agent or Firm:
Akinaka Takano