SCRIBING WHEEL AND MANUFACTURING METHOD OF THE SAME

Title:

SCRIBING WHEEL AND MANUFACTURING METHOD OF THE SAME

Document Type and Number:

Japanese Patent JP2016007739

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a scribing wheel capable of improving the end surface strength of a substrate when scribing and fragmenting a brittle material substrate.SOLUTION: A diamond film is formed on a polished surface by polishing the circumference of a scribing wheel into a V shape. Then, a polished surface 15 is formed by rough polishing so that a belt-like portion including an edge at the tip of the V shape has an apex angle α2. A polished surface 16 with an apex angle α3 is formed by finish polishing the belt-like portion including the edge among the polished surface 15. A polishing width w from the edge to a boundary between the rough polishing and the finish polishing is 20 μm or more. In this way, the unevenness of the edge of a blade tip and an inclined surface can be reduced, thereby improving the end surface strength of a brittle material substrate when scribing.

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Inventors:

KITAICHI MITSURU
TOMEI NAOKO
FUKUNISHI TOSHIO

Application Number:

JP2014128858A

Publication Date:

January 18, 2016

Filing Date:

June 24, 2014

Export Citation:

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Assignee:

MITSUBOSHI DIAMOND IND CO LTD

International Classes:

B28D5/00

Domestic Patent References:

JP2013202975A	2013-10-07
JP2012011475A	2012-01-19

Attorney, Agent or Firm:

Yoshiki Okamoto

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