Title:
サーボ型振動センサ及び振動制御装置
Document Type and Number:
Japanese Patent JP5322710
Kind Code:
B2
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Inventors:
Teruo Maruyama
Masashi Yasuda
Masashi Yasuda
Application Number:
JP2009058692A
Publication Date:
October 23, 2013
Filing Date:
March 11, 2009
Export Citation:
Assignee:
TOKKYOKIKI CORPORATION
International Classes:
G01H11/06; F16F15/02; G01H1/00; G05D19/02; H01L21/027
Domestic Patent References:
| JP3129140A | ||||
| JP854039A | ||||
| JP8241128A | ||||
| JP979900A | ||||
| JP11148815A | ||||
| JP2001126977A | ||||
| JP2003130628A | ||||
| JP2004251666A | ||||
| JP2006283966A | ||||
| JP2007155038A | ||||
| JP2008190943A | ||||
| JP200941954A | ||||
| JP628698Y2 |
Attorney, Agent or Firm:
Ryuhei Nishimura
Akiko Sato
Saito Shindai
Akiko Sato
Saito Shindai