To provide a spin coating apparatus which forms a coating film with high quality such as with uniform film thickness, without including foam and the like by the spin coating.
The spin coating apparatus 1 is provided with a rotation part 2 which holds a disc substrate 5 having a central aperture 51 in an approximately horizontal state to rotatively drive and a nozzle part 3 which discharges a coating liquid d wherein the nozzle part 3 has a discharge mouth 31 to drop the coating liquid d to continual circles that are concentric with the central aperture 51 at the proximity of the central aperture 51 of the disc substrate 5. The discharge mouth 31 consists of a circular slit 32 or consists of many apertures 34 with a finely small diameter, which are formed annularly in an annexed state.
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KOKURYO HIDEKI
JPH07136573A | 1995-05-30 | |||
JPH02101737A | 1990-04-13 |
Tomohiro Harada