Title:
SUPERCONDUCTING JUNCTION ELEMENT AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2002043640
Kind Code:
A
Abstract:
To obtain a superconducting junction element and its manufacturing method in which a superconducting junction having enhanced integration and planarity can be implemented easily.
The superconducting junction element comprises a recess 21A formed on a substrate 21 of LSAT in the pattern of lower electrode 22E or wiring, a first superconducting layer 22 filling the recesses 21A, a trench 25 made to form an inclination, i.e., a ramp 22R, for forming a junction at a part of the first superconducting layer 22, and a second superconducting layer 26 for filling the trench 25 to form a junction to the first superconducting layer 22.
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Inventors:
NAMIGASHIRA TSUNEHIRO
Application Number:
JP2000230863A
Publication Date:
February 08, 2002
Filing Date:
July 31, 2000
Export Citation:
Assignee:
FUJITSU LTD
INT SUPERCONDUCTIVITY TECH
INT SUPERCONDUCTIVITY TECH
International Classes:
H01L39/22; H01L39/24; (IPC1-7): H01L39/22; H01L39/24
Attorney, Agent or Firm:
Kiyoshi Manabe (3 people outside)