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Title:
TIN COATED TI MEMBER HAVING HIGH CORROSION RESISTANCE
Document Type and Number:
Japanese Patent JPH0578820
Kind Code:
A
Abstract:

PURPOSE: To obtain a TiN coated Ti member having excellent corrosion resistance in a nonoxidizing environment and capable of expecting improvement of corrosion resistance in gaseous halogen.

CONSTITUTION: A TiN coating film is formed on a Ti member by dry coating to obtain a TiN coated Ti member. The TiN coating film has crystal orientation at (111) faces and ≥0.2 ratio of the peak intensity I(200) of (200) face by X-ray diffraction to the peak intensity I(111) of (111) faces.


Inventors:
SATO HIROSHI
TOMARI HARUO
SUGIZAKI YASUAKI
YASHIKI TAKASHI
Application Number:
JP24351191A
Publication Date:
March 30, 1993
Filing Date:
September 24, 1991
Export Citation:
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Assignee:
KOBE STEEL LTD
International Classes:
C23C14/06; C23C14/34; (IPC1-7): C23C14/06; C23C14/34
Attorney, Agent or Firm:
Kanemaru Shoichi



 
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