Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP3784250
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a safe vacuum pump capable of bringing a device to a reuse possible condition speedily by replacing the vacuum pump without scratching a chamber and a product during treatment by a fragment of a rotor even if the rotor is broken.
SOLUTION: In the vacuum pump in which a gas exhaust part consisting of a vane exhaust part L1 and/or a groove exhaust part L2 is constituted by the rotor R and a stator S inside a pump casing 14, at least a part of a stator S side member of the gas exhaust part constitutes a scattering prevention member 40 for preventing scattering of fragments of the rotor R on a suction port side of the rotor R when the rotor R is broken, the scattering prevention member 40 has a substantially vertical plane part 40a for a rotary shaft of the rotor R in a clearance part in the axial direction of the rotor R, and a substantially cylindrical shape part 40b is provided integrally with the plane part 40a on an inside diameter side of the pump casing 14.
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Inventors:
Matsutaro Miyamoto
Application Number:
JP2000337576A
Publication Date:
June 07, 2006
Filing Date:
November 06, 2000
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04D19/04; F04D29/54; (IPC1-7): F04D19/04; F04D29/54
Domestic Patent References:
| JP10252684A | ||||
| JP4116694U | ||||
| JP2002115691A | ||||
| JP6014491U | ||||
| JP11513775A | ||||
| JP60043197U | ||||
| JP2059294U | ||||
| JP11247790A | ||||
| JP63183297A | ||||
| JP57043384U |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Shintaro Hotta
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