Title:
A manufacturing method of a piezoelectric element, a manufacturing method of a fluid injection head, and a manufacturing method of an ultrasonic transducer
Document Type and Number:
Japanese Patent JP6183599
Kind Code:
B2
Abstract:
A method of manufacturing a piezoelectric element includes a first electrode, a piezoelectric layer, and a second electrode, in which unevenness on one surface of the piezoelectric layer is formed by forming an oxidizable metal layer on the one surface of the piezoelectric layer; aggregating the metal layer by thermal oxidation; and performing isotropic etching on the metal layer aggregated on the one surface of the piezoelectric layer.
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Inventors:
High Standard
Takahiro Uejo
Tatsuro Torimoto
Toshihiro Shimizu
Shiro Yazaki
Takahiro Uejo
Tatsuro Torimoto
Toshihiro Shimizu
Shiro Yazaki
Application Number:
JP2013170801A
Publication Date:
August 23, 2017
Filing Date:
August 20, 2013
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L41/253; B41J2/14; B41J2/16; H01L41/047; H01L41/09; H01L41/29; H01L41/313; H01L41/332; H01L41/43; H04R31/00
Domestic Patent References:
| JP2192459A | ||||
| JP8088333A | ||||
| JP2002134719A | ||||
| JP2012199872A | ||||
| JP2007116004A | ||||
| JP2008055872A |
Attorney, Agent or Firm:
Hiroyuki Kurihara