Title:
荷電粒子光学装置における試料キャリアの温度を測定する方法
Document Type and Number:
Japanese Patent JP5855429
Kind Code:
B2
Abstract:
The invention relates to a method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals (210a, 21 0b), showing metals (208, 210) with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.
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Inventors:
Stefanus Hubertus Leonardus van den Baume
Plain dona
Lawrence Franz Thames Quackman
Uwe Luken
Herve-Villiam Remy
Hendrick Nicolas Slingherland
Martin Verheien
Herbert Yelun van der Vertell
Plain dona
Lawrence Franz Thames Quackman
Uwe Luken
Herve-Villiam Remy
Hendrick Nicolas Slingherland
Martin Verheien
Herbert Yelun van der Vertell
Application Number:
JP2011248867A
Publication Date:
February 09, 2016
Filing Date:
November 14, 2011
Export Citation:
Assignee:
FEI COMPANY
International Classes:
H01J37/20; G01K5/62; G01K11/20; G01K11/30; G01N23/04
Domestic Patent References:
| JP60254615A | ||||
| JP59130053A | ||||
| JP55122124A | ||||
| JP3101039A |
Attorney, Agent or Firm:
Tadahiko Ito
Shinsuke Onuki
Tadashige Ito
Shinsuke Onuki
Tadashige Ito