Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/087149
Kind Code:
A1
Abstract:
A charged particle beam device enabling prevention of degradation of reproducibility of measurement caused by an increase of the beam diameter attributed to an image shift and having a function of dealing with device-to-device variation.
The charged particle beam device is used for measuring the dimensions of a pattern on a specimen using a line profile obtained by detecting secondary charged particles emitted from the specimen when the specimen is scanned with a primary charged particle beam converged on the specimen. A lookup table in which the position of image shift and the variation of the beam diameter are associated is prepared in advance by actual measurement or calculation and registered. When the dimensions are measured, image processing is carried out so as to correct the line profile for the variation of the beam diameter while the lookup table is referenced, and thereby the situation where the beam diameter is effectively equal is produced irrespective of the position of the image shift. With this, measurement by the charged particle beam excellent in reproducibility can be carried out.
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Inventors:
SHISHIDO CHIE (JP)
MIYAMOTO ATSUSHI (JP)
IWASAKI MAYUKA (JP)
NISHIURA TOMOFUMI (JP)
KOTAKI GO (JP)
MIYAMOTO ATSUSHI (JP)
IWASAKI MAYUKA (JP)
NISHIURA TOMOFUMI (JP)
KOTAKI GO (JP)
Application Number:
PCT/JP2010/000423
Publication Date:
August 05, 2010
Filing Date:
January 26, 2010
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
SHISHIDO CHIE (JP)
MIYAMOTO ATSUSHI (JP)
IWASAKI MAYUKA (JP)
NISHIURA TOMOFUMI (JP)
KOTAKI GO (JP)
SHISHIDO CHIE (JP)
MIYAMOTO ATSUSHI (JP)
IWASAKI MAYUKA (JP)
NISHIURA TOMOFUMI (JP)
KOTAKI GO (JP)
International Classes:
G01B15/00; H01J37/22
Foreign References:
| JP2005322423A | 2005-11-17 | |||
| JP2006153837A | 2006-06-15 | |||
| JP2003121132A | 2003-04-23 | |||
| JP2005156436A | 2005-06-16 | |||
| JP2009016181A | 2009-01-22 | |||
| JPH01293478A | 1989-11-27 | |||
| JP2007194007A | 2007-08-02 | |||
| JP2005285746A | 2005-10-13 | |||
| JPH06110397A | 1994-04-22 | |||
| JPH10106469A | 1998-04-24 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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