Title:
ELECTROSTATIC CHUCK DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/126534
Kind Code:
A1
Abstract:
An electrostatic chuck device provided with an electrostatic chuck part having a placement surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic chucking; a base part for cooling the electrostatic chuck part; and a bonding layer for bonding the electrostatic chuck part and the base part into an integrated unit, the electrostatic chuck part being provided with a first through hole, the base part being provided with a second through hole that communicates with the first through hole, a cylindrical insulator being secured in the second through hole, a ring-shaped sealing member being sandwiched between the electrostatic chuck part and the tip end surface of the insulator on the electrostatic chuck part side, and a cylindrical insulating wall member being positioned on the radially inward side of the sealing member.
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Inventors:
KOSAKAI MAMORU (JP)
MIURA YUKIO (JP)
ISHIMURA KAZUNORI (JP)
MAEDA KEISUKE (JP)
KOUNO HITOSHI (JP)
KINPARA YUUKI (JP)
MAETA SHINICHI (JP)
ITO TOMOMI (JP)
MIURA YUKIO (JP)
ISHIMURA KAZUNORI (JP)
MAEDA KEISUKE (JP)
KOUNO HITOSHI (JP)
KINPARA YUUKI (JP)
MAETA SHINICHI (JP)
ITO TOMOMI (JP)
Application Number:
PCT/JP2017/001507
Publication Date:
July 27, 2017
Filing Date:
January 18, 2017
Export Citation:
Assignee:
SUMITOMO OSAKA CEMENT CO LTD (JP)
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| WO2013118781A1 | 2013-08-15 |
Foreign References:
| JP2004031665A | 2004-01-29 | |||
| JP2008270721A | 2008-11-06 | |||
| JPH04147643A | 1992-05-21 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
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